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离子束辅助沉积对类金刚石膜结构影响的计算机模拟

李之杰 潘正瑛 朱 靖 魏 启 王月霞 臧亮坤 周 亮 刘提将

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离子束辅助沉积对类金刚石膜结构影响的计算机模拟

李之杰, 潘正瑛, 朱 靖, 魏 启, 王月霞, 臧亮坤, 周 亮, 刘提将

Simulations of the structure characteristic of diamond-like carbon films formed by ion-beam-assisted deposition

Li Zhi-Jie, Pan Zheng-Ying, Zhu Jing, Wei Qi, Wang Yue-Xia, Zang Liang-Kun, Zhou Liang, Liu Ti-Jiang
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  • 采用分子动力学(MD)模拟研究了离子束辅助沉积(1BAD)生长类金刚石(DLC)膜的物理过程.分 别选C2分子和Ar离子作为沉积源和辅助沉积粒子.改变Ar的入射能量和到达比(A r/C),研 究了它对DLC膜结构的影响.重点讨论了Ar辅助沉积引起表面原子的瞬间活性变化对薄膜结构 产生的影响.分析表明,由于Ar离子的轰击引起的能量和动量的传递,大大地增强了C原子在 表面的反冲动能及迁移概率,增加了合成薄膜的SP3键含量.研究结果和实验 观察一致,并从合成机理上给出了一些定量解释.
    Molecular dynamics (MD) simulation was used to study the growth process of dia mond_like carbon (DLC) films synthesized via ion_beam_assisted deposition (IBAD ). The C2 molecules and Ar ions were selected as deposition and assis tance pr ojectiles, respectively. The influence of the impact energy of Ar as well as the assistance/deposition atomic ratio (Ar/C), on the film structure was investiga ted. The transient mobility and the migration of C adatoms caused by Ar impact were studied. Our results indicate that the impact-induced high recoil energy a nd displacement of deposited C atoms play a leading role in the growth of DLC f ilms. This can be attributed to the incident energy and momentum of assistance Ar. Our results agree well with the experimental observation. Furthermore, it e xplains the growth mechanism partly.
    • 基金项目: 国家自然科学基金(批准号:10275012)资助的课题.
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  • 文章访问数:  6898
  • PDF下载量:  631
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出版历程
  • 收稿日期:  2004-05-20
  • 修回日期:  2004-10-20
  • 刊出日期:  2005-05-10

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