辐射探测芯片吸收膜理论设计及镍磷黑膜制备

李亚楠; 梁中翥; 梁静秋; 郑娜; 方伟; 王维彪; 禹秉熙

doi:10.7498/aps.59.4530

摘要

对新型条形辐射探测芯片的吸收膜层进行了理论分析,并且在金刚石材质的探测芯片上采用电镀方法制备了镍磷黑吸收膜.辐射探测芯片的膜层吸收分析表明,芯片吸收膜层的吸收率正比于表面粗糙度.通过对辐射吸收膜层设计与制作工艺的研究,制备出一种用于条形辐射探测芯片的镍磷黑吸收膜,通过测量其表面形貌结构,表明该膜层具有50 nm—1.5 μm范围的微结构;红外吸收测试表明其吸收率在1.4—8 μm波段为0.989以上,从而提高了辐射探测芯片的性能.

关键词:

Abstract

The black-nickel film on the flat type radiometer chip was investigated, and a black-nickel film which can be applied in this chip was prepared using electroplating method. The analyses of absorption of radiometer chip indicated that the absorption rate of the chip is proportional to the surface roughness. The black-nickel film was prepared and tested, and surface morphology testing showed that this film has microstructures of the scale 50 nm—1.5 μm. Infrared absorption measurement indicated that the absorptivity of the film in the 1.4—8 μm range is higher than 0.989. This high absorptivity black-nickel film improves the performance of the chip.

Keywords:

作者及机构信息

(1)中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春 130033; (2)中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春 130033; 中国科学院研究生院,北京 100049; (3)中国科学院东北地理与农业生态研究所,长春 130012

基金项目: 吉林省科技发展计划(批准号:20080122,20090351)和国家自然科学基金(批准号:40803021)资助的课题.

Authors and contacts

(1)Northeast Institute of Geography and Agricultural Ecology, Chinese Academy of Sciences, Changchun 130012, China; (2)State Key Laboratory of Applied Optics,Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China; (3)State Key Laboratory of Applied Optics,Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China; Graduate University of the Chinese Academy of Sciences, Beijing 100049, China

参考文献

[1]	Claus F, Dominique A C, Christoph W, Martin A, Steven D, Alain F, Wolfgang F, Antonio J, André C, Hansjrg R 1997 Sol. Phys. 175 267
[2]	Willson R C 1980 Appl. Opt. 19 3256
[3]	Yu B X, Yao H S, Fang W 2005 Acta Opt. Sin. 25 786(in Chinese)[禹秉熙、姚海顺、方伟2005光学学报25 786]
[4]	Wang Y P, Fang W, Yu B X 2008 Opt. Precision Eng. 16 433 (in Chinese) [王玉鹏、方伟、禹秉熙 2008 光学精密工程 16 433]
[5]	Wang B Z 1999 Acta Energiae Sol. Sin. (Special Issue) 20 63(in Chinese)[王炳忠 1999 太阳能学报(特刊) 20 63]
[6]	Wang B Z 2008 Modern Meteorological Radiation Measurement Technology (Beijing:China Meteorological Press) p48(in Chinese)[王炳忠 2008 现代气象辐射测量技术(北京:气象出版社)第48页]
[7]	Walker P L, Thrower P A 1977 Chemistry and Physics of Carbon (New York: Marcel Dekker) p1
[8]	Roos A, Georgson M 1991 Sol. Energy Mater. 22 15
[9]	Roos A, Georgson M 1991 Sol. Energy Mater. 22 29
[10]	Zhang Q C 2006 Sol. Energy Mater. Sol. Cells 62 63
[11]	Yan C C, Xue G G, Liu C, Gao S M 2005 Acta Phys. Sin. 54 3058(in Chinese) [闫长春、薛国刚、刘诚、高淑梅2005 物理学报 54 3058]
[12]	Zhou B Q, Liu F Z, Zhu M F, Zhou Y Q, Wu Z H, Chen X 2007 Acta Phys. Sin. 56 2422 (in Chinese)[周炳卿、刘丰珍、朱美芳、周玉琴、吴忠华、陈兴 2007 物理学报56 2422]
[13]	Ren X C, Guo L X 2009 Acta Phys. Sin. 58 1627 (in Chinese)[任新成、郭立新 2009 物理学报 58 1627]
[14]	Zhang D M, Li L, Li Z H, Guan L, Hou S P, Tan X Y 2005 Acta Phys. Sin. 54 1283 [张端明、李莉、李智华、关丽、侯思普、谭新玉 2005物理学报54 1283]
[15]	Zhang J Y, Yang J M, Xu Y, Yang G H, Yan J, Meng G W, Ding Y N, Wang Y 2008 Acta Phys. Sin. 57 985(in Chinese)[张继彦、杨家敏、许琰、杨国洪、颜君、孟广为、丁耀南、汪艳 2008物理学报 57 985]
[16]	Kakuen T, Richard O B 2001 Heat Mass Trans. 44 4059
[17]	Chen J 2008 (MS Thesis) (Hangzhou:Zhejiang University of Technology) (in Chinese) [陈君 2008 (硕士学位论文) (杭州:浙江工业大学)]
[18]	Hu W X 2001 Acta Energiae Sol. Sin. 22 443(in Chinese)[胡文旭 2001 太阳能学报 22 443]
[19]	Sawomir K 2008 Thin Solid Films 516 4915
[20]	Nobuteru T, Masahiko O, Akiyoshi C, Hideyo O 2008 Diamond Relat. Mater. 17 498
[21]	Xiao B, Feng J, Chen J C, Yan J K, Gan G Y 2008 Acta Phys. Sin. 57 3769 [肖冰、冯晶、陈敬超、严继康、甘国友 2008物理学报57 3769]

施引文献

[1]	Claus F, Dominique A C, Christoph W, Martin A, Steven D, Alain F, Wolfgang F, Antonio J, André C, Hansjrg R 1997 Sol. Phys. 175 267
[2]	Willson R C 1980 Appl. Opt. 19 3256
[3]	Yu B X, Yao H S, Fang W 2005 Acta Opt. Sin. 25 786(in Chinese)[禹秉熙、姚海顺、方伟2005光学学报25 786]
[4]	Wang Y P, Fang W, Yu B X 2008 Opt. Precision Eng. 16 433 (in Chinese) [王玉鹏、方伟、禹秉熙 2008 光学精密工程 16 433]
[5]	Wang B Z 1999 Acta Energiae Sol. Sin. (Special Issue) 20 63(in Chinese)[王炳忠 1999 太阳能学报(特刊) 20 63]
[6]	Wang B Z 2008 Modern Meteorological Radiation Measurement Technology (Beijing:China Meteorological Press) p48(in Chinese)[王炳忠 2008 现代气象辐射测量技术(北京:气象出版社)第48页]
[7]	Walker P L, Thrower P A 1977 Chemistry and Physics of Carbon (New York: Marcel Dekker) p1
[8]	Roos A, Georgson M 1991 Sol. Energy Mater. 22 15
[9]	Roos A, Georgson M 1991 Sol. Energy Mater. 22 29
[10]	Zhang Q C 2006 Sol. Energy Mater. Sol. Cells 62 63
[11]	Yan C C, Xue G G, Liu C, Gao S M 2005 Acta Phys. Sin. 54 3058(in Chinese) [闫长春、薛国刚、刘诚、高淑梅2005 物理学报 54 3058]
[12]	Zhou B Q, Liu F Z, Zhu M F, Zhou Y Q, Wu Z H, Chen X 2007 Acta Phys. Sin. 56 2422 (in Chinese)[周炳卿、刘丰珍、朱美芳、周玉琴、吴忠华、陈兴 2007 物理学报56 2422]
[13]	Ren X C, Guo L X 2009 Acta Phys. Sin. 58 1627 (in Chinese)[任新成、郭立新 2009 物理学报 58 1627]
[14]	Zhang D M, Li L, Li Z H, Guan L, Hou S P, Tan X Y 2005 Acta Phys. Sin. 54 1283 [张端明、李莉、李智华、关丽、侯思普、谭新玉 2005物理学报54 1283]
[15]	Zhang J Y, Yang J M, Xu Y, Yang G H, Yan J, Meng G W, Ding Y N, Wang Y 2008 Acta Phys. Sin. 57 985(in Chinese)[张继彦、杨家敏、许琰、杨国洪、颜君、孟广为、丁耀南、汪艳 2008物理学报 57 985]
[16]	Kakuen T, Richard O B 2001 Heat Mass Trans. 44 4059
[17]	Chen J 2008 (MS Thesis) (Hangzhou:Zhejiang University of Technology) (in Chinese) [陈君 2008 (硕士学位论文) (杭州:浙江工业大学)]
[18]	Hu W X 2001 Acta Energiae Sol. Sin. 22 443(in Chinese)[胡文旭 2001 太阳能学报 22 443]
[19]	Sawomir K 2008 Thin Solid Films 516 4915
[20]	Nobuteru T, Masahiko O, Akiyoshi C, Hideyo O 2008 Diamond Relat. Mater. 17 498
[21]	Xiao B, Feng J, Chen J C, Yan J K, Gan G Y 2008 Acta Phys. Sin. 57 3769 [肖冰、冯晶、陈敬超、严继康、甘国友 2008物理学报57 3769]

计量

文章访问数: 6948
PDF下载量: 625
被引次数: 0

姓名
邮箱
手机号码
标题
留言内容
验证码

搜索

留言板