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超导纳米线单光子探测器

张蜡宝 康琳 陈健 赵清源 郏涛 许伟伟 曹春海 金飚兵 吴培亨

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超导纳米线单光子探测器

张蜡宝, 康琳, 陈健, 赵清源, 郏涛, 许伟伟, 曹春海, 金飚兵, 吴培亨

Fabrication of superconducting nanowiresingle-photon detector

Zhang La-Bao, Kang Lin, Chen Jian, Zhao Qing-Yuan, Jia Tao, Xu Wei-Wei, Cao Chun-Hai, Jin Biao-Bing, Wu Pei-Heng
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  • 利用磁控溅射、电子束光刻和反应离子刻蚀等微加工技术,开展了超导纳米线单光子探测器(SNSPD)的研究.通过对SNSPD的设计和制备工艺参数的优化,成功制备出了高质量的SNSPD.单光子检测实验表明,制备的SNSPD对660 nm波长的光信号,系统检测效率可达30%,对1550 nm波长光信号,最大系统检测效率为4.2%.在平均暗计数小于10 c/s的情况下,系统检测效率大于20%(660 nm)和3%(1550 nm).
    In this paper,the fabrication details and optimization of micro-fabrication process are presented for developing superconducting nanowire single-photon detectors (SNSPD). Besides,the device failure analysis is also introduced. With those methods,we successfully fabricated high-quality SNSPDs whose maximum system efficiencies were up to 30% for 660 nm wavelength and 4.2% for 1550 nm wavelength according to the single-photon detection experiment. At the dark count rate of 10 c/s,the detection efficiencies were 20% (660 nm) and 3% (1550 nm) with the SNSPD fabricated with above mentioned methods.
    • 基金项目: 国家重点基础研究发展计划(批准号:2011CBA00200,2007CB310404)和国家自然科学基金(批准号:10874074)资助的课题.
    [1]

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    [4]

    Chang J T, Wu L A 2003 Acta Phys. Sin. 52 1132 (in Chinese) [常君弢、吴令安 2003 物理学报 52 1132]

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    Wang J D, Wu Z H, Zhang B, Wei Z J, Liao C J, Ju S H 2008 Acta Phys. Sin. 57 5620 (in Chinese) [王金东、吴祖恒、张 兵 2008 物理学报 57 5620]

    [6]

    Takesue H, Nam S W, Zhang Q, Hadfield R H, Honjo T, Tamaki K, Yamamoto Y 2007 Nat. Photonics 1 343

    [7]

    Rosenberg D, Peterson C G, Harrington J W, Rice P R, Dallmann N, Tyagi K T, McCabe K P, Nam S, Baek B, Hadfield R H, Hughes R J, Nordholt J E 2009 New J. Phys. 11 045009

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    Stucki D, Walenta N, Vannel F, Thew R T, Gisin N, Zbinden H, Gray S, Towery C R, Ten S 2009 New J. Phys. 11 075003

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    Hadfield R H, Habif J L, Schlafer J, Schwall R E, Nam S W 2006 Appl. Phys. Lett. 89 031109

    [10]

    Zhang X Z, Gong W G, Tan Y G, Ren Z Z, Guo X T 2009 Chin. Phys. B 18 2143

    [11]

    Quan D X, Pei C X, Liu D, Zhao N 2010 Acta Phys Sin. 59 2493 (in Chinese) [权东晓、裴昌幸、刘 丹 2010 物理学报 59 2493]

    [12]

    Hadfield R H, Stevens M J, Mirin R P, Nam S W 2007 J. Appl. Phys. 101 7

    [13]

    Hadfield R H, Stevens M J, Mirin R P, Nam S W 2007 Journal of Applied Physics 101 103104

    [14]

    Zhang J, Boiadjieva N, Chulkova G, Deslandes H, Goltsman G N, Korneev A, Kouminov P, Leibowitz A, Lo W, Malinsky R, Okunev O, Pearlman A, Slysz W, Smirnov K, Tsao C, Verevkin A, Voronov B, Wilsher K, Sobolewski R 2003 Electron. Lett. 39 1086

    [15]

    Robinson B S, Kerman A J, Dauler E A, Barron R O, Caplan D O, Stevens M L, Carney J J, Hamilton S A, Yang J K W, Berggren K K 2006 Opt. Lett. 31 444

    [16]

    Fujiyoshi S, Fujiwara M, Matsushita M 2008 Phys. Rev. Lett. 100 4

    [17]

    Kadin A M, Leung M, Smith A D 1990 Phys. Rev. Lett. 65 3193

    [18]

    Gupta D, Kadin A M 1999 IEEE Trans. Appl. Supercond. 9 4487

    [19]

    Semenov A D, Gol'tsman G N, Korneev A A 2001 Physica C 351 349

    [20]

    Verevkin A, Zhang J, Sobolewski R, Lipatov A, Okunev O, Chulkova G, Korneev A, Smirnov K, Goltsman G N, Semenov A 2002 Appl. Phys. Lett. 80 4687

    [21]

    Annunziata A J, Santavicca D F, Chudow J D, Frunzio L, Rooks M J, Frydman A, Prober D E 2009 IEEE Trans. Appl. Supercond. 19 327

    [22]

    Miki S, Takeda M, Fujiwara M, Sasaki M, Otomo A, Wang Z 2009 Appl. Phys. Express 2

    [23]

    Dorenbos S N, Reiger E M, Perinetti U, Zwiller V, Zijlstra T, Klapwijk T M 2008 Appl. Phys. Lett. 93 131101

    [24]

    Shibata H, Asahi M, Maruyama T, Akazaki T, Takesue H, Honjo T, Tokura Y 2009 IEEE Trans. Appl. Supercond. 19 358

    [25]

    Portesi C, Borini S, Taralli E, Rajteri M, Monticone E 2008 Supercond. Sci. Technol. 21 034006

    [26]

    Seleznez V A, Tarkhov M A, Voronov B M, Milostnaya, II, Lyakhno V Y, Garbuz A S, Mikhailov M Y, Zhigallina O M, Goltsman G N 2008 Supercond. Sci. Technol. 21 6

    [27]

    Zhang L, Zhao Q, Zhong Y, Chen J, Cao C, Xu W, Kang L, Wu P, Shi W 2009 Applied Physics B: Lasers and Optics 97 187

    [28]

    Miki S, Fujiwara M, Sasaki M, Baek B, Miller A J, Hadfield R H, Nam S W, Wang Z 2008 Applied Physics Letters 92 061116

    [29]

    Thew R T, Stucki D, Gautier J D, Zbinden H, Rochas A 2007 Appl. Phys. Lett. 91

    [30]

    Divochiy A, Marsili F, Bitauld D, Gaggero A, Leoni R, Mattioli F, Korneev A, Seleznev V, Kaurova N, Minaeva O, Goltsman G, Lagoudakis K G, Benkhaoul M, Levy F, Fiore A 2008 Nat. Photonics 2 377

  • [1]

    Goltsman G N, Okunev O, Chulkova G, Lipatov A, Semenov A, Smirnov K, Voronov B, Dzardanov A, Williams C, Sobolewski R 2001 Appl. Phys. Lett. 79 705

    [2]

    Wei Z J, Li K Z, Zhou P, Wang J D, Liao C J, Guo J P, Liang R S, Liu S H 2008 Chin. Phys. B 17 4142

    [3]

    Liu Y, Wu Q L, Han Z F, Dai Y M, Guo G C 2006 Chin. Phys. Lett. 23 252

    [4]

    Chang J T, Wu L A 2003 Acta Phys. Sin. 52 1132 (in Chinese) [常君弢、吴令安 2003 物理学报 52 1132]

    [5]

    Wang J D, Wu Z H, Zhang B, Wei Z J, Liao C J, Ju S H 2008 Acta Phys. Sin. 57 5620 (in Chinese) [王金东、吴祖恒、张 兵 2008 物理学报 57 5620]

    [6]

    Takesue H, Nam S W, Zhang Q, Hadfield R H, Honjo T, Tamaki K, Yamamoto Y 2007 Nat. Photonics 1 343

    [7]

    Rosenberg D, Peterson C G, Harrington J W, Rice P R, Dallmann N, Tyagi K T, McCabe K P, Nam S, Baek B, Hadfield R H, Hughes R J, Nordholt J E 2009 New J. Phys. 11 045009

    [8]

    Stucki D, Walenta N, Vannel F, Thew R T, Gisin N, Zbinden H, Gray S, Towery C R, Ten S 2009 New J. Phys. 11 075003

    [9]

    Hadfield R H, Habif J L, Schlafer J, Schwall R E, Nam S W 2006 Appl. Phys. Lett. 89 031109

    [10]

    Zhang X Z, Gong W G, Tan Y G, Ren Z Z, Guo X T 2009 Chin. Phys. B 18 2143

    [11]

    Quan D X, Pei C X, Liu D, Zhao N 2010 Acta Phys Sin. 59 2493 (in Chinese) [权东晓、裴昌幸、刘 丹 2010 物理学报 59 2493]

    [12]

    Hadfield R H, Stevens M J, Mirin R P, Nam S W 2007 J. Appl. Phys. 101 7

    [13]

    Hadfield R H, Stevens M J, Mirin R P, Nam S W 2007 Journal of Applied Physics 101 103104

    [14]

    Zhang J, Boiadjieva N, Chulkova G, Deslandes H, Goltsman G N, Korneev A, Kouminov P, Leibowitz A, Lo W, Malinsky R, Okunev O, Pearlman A, Slysz W, Smirnov K, Tsao C, Verevkin A, Voronov B, Wilsher K, Sobolewski R 2003 Electron. Lett. 39 1086

    [15]

    Robinson B S, Kerman A J, Dauler E A, Barron R O, Caplan D O, Stevens M L, Carney J J, Hamilton S A, Yang J K W, Berggren K K 2006 Opt. Lett. 31 444

    [16]

    Fujiyoshi S, Fujiwara M, Matsushita M 2008 Phys. Rev. Lett. 100 4

    [17]

    Kadin A M, Leung M, Smith A D 1990 Phys. Rev. Lett. 65 3193

    [18]

    Gupta D, Kadin A M 1999 IEEE Trans. Appl. Supercond. 9 4487

    [19]

    Semenov A D, Gol'tsman G N, Korneev A A 2001 Physica C 351 349

    [20]

    Verevkin A, Zhang J, Sobolewski R, Lipatov A, Okunev O, Chulkova G, Korneev A, Smirnov K, Goltsman G N, Semenov A 2002 Appl. Phys. Lett. 80 4687

    [21]

    Annunziata A J, Santavicca D F, Chudow J D, Frunzio L, Rooks M J, Frydman A, Prober D E 2009 IEEE Trans. Appl. Supercond. 19 327

    [22]

    Miki S, Takeda M, Fujiwara M, Sasaki M, Otomo A, Wang Z 2009 Appl. Phys. Express 2

    [23]

    Dorenbos S N, Reiger E M, Perinetti U, Zwiller V, Zijlstra T, Klapwijk T M 2008 Appl. Phys. Lett. 93 131101

    [24]

    Shibata H, Asahi M, Maruyama T, Akazaki T, Takesue H, Honjo T, Tokura Y 2009 IEEE Trans. Appl. Supercond. 19 358

    [25]

    Portesi C, Borini S, Taralli E, Rajteri M, Monticone E 2008 Supercond. Sci. Technol. 21 034006

    [26]

    Seleznez V A, Tarkhov M A, Voronov B M, Milostnaya, II, Lyakhno V Y, Garbuz A S, Mikhailov M Y, Zhigallina O M, Goltsman G N 2008 Supercond. Sci. Technol. 21 6

    [27]

    Zhang L, Zhao Q, Zhong Y, Chen J, Cao C, Xu W, Kang L, Wu P, Shi W 2009 Applied Physics B: Lasers and Optics 97 187

    [28]

    Miki S, Fujiwara M, Sasaki M, Baek B, Miller A J, Hadfield R H, Nam S W, Wang Z 2008 Applied Physics Letters 92 061116

    [29]

    Thew R T, Stucki D, Gautier J D, Zbinden H, Rochas A 2007 Appl. Phys. Lett. 91

    [30]

    Divochiy A, Marsili F, Bitauld D, Gaggero A, Leoni R, Mattioli F, Korneev A, Seleznev V, Kaurova N, Minaeva O, Goltsman G, Lagoudakis K G, Benkhaoul M, Levy F, Fiore A 2008 Nat. Photonics 2 377

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出版历程
  • 收稿日期:  2010-05-15
  • 修回日期:  2010-06-06
  • 刊出日期:  2011-03-15

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