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利用经过我们修正并简化的“完全扩散”电子散射模型,计算了俄歇电子能谱定量分析中的背散射修正因子。得到的结果与志水隆一等人用复杂的蒙特-卡罗计算得到的结果很接近,并优于Reuter的经验公式和Love等人用简单的蒙特-卡罗计算得到的拟合公式。我们的计算方法很简便,可以方便地应用于各种实验条件,不需要像志水隆一等人那样进行内插和外推。The backscattering factors in quantitative analysis in AES have been calculated using the "full diffusion" model which had been modified and simplified by us. Our results are quite close to the results obtained by Shimizu et al. using the complex Monte Carlo simulation, and better than the Reuter's empirical equation and Love's regression equation based on the simple Monte Carlo simulation. Our calculation are so simple that it can be applied easily in various experimental conditions without inter polation and extrapolation as used by Shimizu et al.
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