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利用沟道背散射、俄歇和X射线光电子能谱技术研究了Nd:YAG和红宝石脉冲激光退火的离子注入GaAs样品的表面性质。结果表明,对于这两种激光都存在一个从无定形向单晶转化的阈值能量,在阈值能量附近,没有明显的表面分解。高能量密度可引起明显的分解和损伤。利用热流理论计算了杂质的再分布。对于两种激光都得到了Te在GaAs中较高的替位率。Several surface properties of implanted GaAs after Nd:YAG and ruby laser annealing have been investigated by the techniques of RBS combined with channeling, Auger and X-ray photoelectron spectroscopy. The results indicate that recovery of the implanted amorphous layer exhibits a threshold and no appreciable surface decomposition occurs in narrow energy density window just above the threshold. High energy densities cause significant surface decomposition and damage. We calculate the redistribution by heat flow theory. High ratio of Te substitution in GaAs is obtained.
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