Abstract： In this paper, we report the study of the dependence of electrical resistivities of sputtering Pd films on their thicknesses and electrical resistivities of sputtering Pd films under different sputtering power. The results show that there is a small diversity between the latter theory of "size effects" and results of the thickness dependence of electrical resistivity. This diversity is due to effect of temperatures of the substrates. It shows that there is optimization during depositing on glass, and sputtering power would af fecth the electrical resistivity. After discussing the problem of substrate temperatures, we obtained a quantitative formula for the substrate temperature dependence of electrical resistivity.