搜索

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

氮离子轰击能量对ta-C:N薄膜结构的影响

韩亮 邵鸿翔 何亮 陈仙 赵玉清

引用本文:
Citation:

氮离子轰击能量对ta-C:N薄膜结构的影响

韩亮, 邵鸿翔, 何亮, 陈仙, 赵玉清

The effect of nitrogen ion bombarding energy on the bonding structure of nitrogenated tetrahedral amorphous carbon film

Han Liang, Shao Hong-Xiang, He Liang, Chen Xian, Zhao Yu-Qing
PDF
导出引用
  • 利用磁过滤真空阴极电弧技术制备了sp3键含量不小于80%的四面体非晶碳薄膜(ta-C), 然后通过氮离子束改性技术制备了氮掺杂的四面体非晶碳(ta-C:N)薄膜. 利用Raman光谱和X射线光电子能谱对薄膜结构的分析,研究了氮离子轰击能量对ta-C:N薄膜结构的影响. 氮离子对ta-C薄膜的轰击,形成了氮掺杂的ta-C:N薄膜. 氮离子轰击诱导了薄膜中sp3键向sp2键转化, 以及CN键的形成.在ta-C:N薄膜中,氮掺杂的深度和浓度随着氮离子能量的增大而增大. ta-C:N薄膜中sp2键的含量和sp2键团簇的尺寸随着氮离子轰击能量的增大而增加; 在ta-C:N薄膜中, CN键主要由C–N键和C=N键构成, C–N 键的含量随着氮离子轰击能量的增大而减小,但是C=N 键含量随着氮离子轰击能量的增大而增大.在ta-C:N薄膜中不含有CN键结构.
    The tetrahedral amorphous carbon (ta-C) films with more than 80% sp3 in fraction are deposited by the filtered cathode vacuum arc technique. Then the energetic nitrogen (N) ions are used to bombard the ta-C films to fabricate nitrogenated tetrahedral amorphous carbon (ta-C:N) films. The composition and the structure of the films are analyzed by visible Raman spectrum and X-ray photoelectron spectroscopy. The result shows that the bombardment of energetic nitrogen ions can form CN bonds, convert CC bonds into C=C bonds, and increase the size of sp2 cluster. The CN bonds are composed of C=N bonds and CN bonds. The content of C=N bonds increases with the N ion bombardment energy increasing, but the content of CN bonds is inversely proportional to the increase of nitrogen ion energy. In addition, CN bonds do not exist in the films.
    • 基金项目: 陕西省13115科技创新工程重大科技专项(批准号: 2009DKG-29)和中央高校基本 科研业务费专项资金资助的课题.
    • Funds: Project supported by the Key Program of 3115 Science and Technology Originality Innovation Project of Shaanxi Province, China (Grant No. 2009ZDKG-29) and the Fundamental Research Funds for the Central Universities, China.
    [1]

    Ander A, Ander S, Brown I G 1995 Plasma Source Sci. Technol. 4 1

    [2]

    Zhu J Q, Wang J H, Meng S H, Han J C, Zhang L S 2004 Acta Phys. Sin. 53 1151 (in Chinese) [朱嘉琦, 王景贺, 孟松鹤, 韩杰才, 张连升 2004 物理学报 53 1151]

    [3]

    Liang F, Yan X J 1999 Acta Phys. Sin. 48 1095 (in Chinese) [梁风, 严学俭 1999 物理学报 48 1095]

    [4]

    Satyanarayana B S, Hart A, Miline W I, Robertson J 1998 Diamond Relat. Mater. 7 656

    [5]

    Gao W, Gong S L, Zhu J Q, Ma G J 2011 Acta Phys. Sin. 60 027104 (in Chinese) [高巍, 巩水利, 朱嘉琦, 马国佳 2011 物理学报 60 027104]

    [6]

    Panwar O S, Khan M A, Satyanarayana B S, Bhattacharyya R, Mehta B R, Kumar S, Ishpal I 2010 J. Vac. Sci. Technol. B 28 411

    [7]

    Panwar O S, Alim M K, Kumar M, Shivaprasad S M, Satyanarayana B S, Dixit P N, Bhattacharyya R, Khan M Y 2008 Thin Solid Films 516 2331

    [8]

    Panwar O S, Deb B, Satyanarayana B S, Khan M A, Bhattacharyya R, Pal A K 2005 Thin Solid Films 472 180

    [9]

    Polo M C, Andujar J L, Hart A, Robertson J, Milne W I 2000 Diamond Relat. Mater. 9 663

    [10]

    Panwar O S, Alim K M, Kumar S, Basu A, Mehta B R, Kumar S, Ishpal I 2010 Surf. Coat. Technol. 205 2126

    [11]

    Prawer S, Nugent K W, Lifshitz Y 1996 Diamond Relat. Mater. 5 433

    [12]

    Zhang X W, Ke N, Cheung W Y 2003 Diamond Relat. Mater. 12 1

    [13]

    Wixom M K 1990 J. Am. Ceram. Soc. 73 1973

    [14]

    Cheng Y H, Tay B K, Lau S P 2001 Diamond Relat. Mater. 10 2137

    [15]

    Colthup N B, Daly L H, Wiberly S E 1990 Introduction to Infrared and Raman Spectroscopy (3rd Ed.) (New York: Academic Press)

    [16]

    Chowdhury A K M S, Cameron D C, Hashmi M S J 1998 Thin Solid Films 332 62

    [17]

    Kaufman J H, Metin S, Saperstein D D 1989 Phys. Rev. B 39 13053

    [18]

    Merel P, Tabbal M, Chaker M, Moisa S, Margot 1998 J. Appl. Surf. Sci. 136 105

    [19]

    Ripalda J M, Roman E, Galan L 2003 J. Chem. Phys. 118 3748

    [20]

    Yu G H, Zeng L R, Zhu F W, Chai C L, Lai W Y 2001 J. Appl. Phys. 90 4039

    [21]

    Zhu J Q, Han J C, Han X, Schiaberginaki H, Wang J Z 2008 J. Appl. Phys. 104 013512

    [22]

    Das D, Chen K H, Chattopadhyay S, Chattopadhyay S Chen L C 2002 J. Appl. Phys. 91 4944

    [23]

    Papakonstantinou P, Lemoine P 2001 J. Phys. Condens. Matter 13 2971

    [24]

    Ronning C, Feldermann H, Merk R, Hofsäss H 1998 Phys. Rev. B 58 2207

    [25]

    Hellgren N, Guo J, Sathe C, Agui A, Nordgren J, Luo Y, \AAgren H, Sundgren J E 2001 Appl. Phys. Lett. 79 4348

    [26]

    Hofsäss H, Eldermann H F, Merk R, Sebastian M, Ronning C 1998 J. Appl. Phys. A 66 153

    [27]

    Majumdar A, Schäfer J, Mishra P, Ghose D, Meichsner J, Hippler R 2007 Surf. Coat. Technol. 201 6437

    [28]

    McCann R, Roy S S, Papakonstantinou P, Bain M F, Gamble H S, McLaughlin J A 2005 Thin Solid Films 482 34

    [29]

    Bhattacharyya S, Hong J, Turban G 1998 J. Appl. Phys. 83 3922

    [30]

    Kaukonen M, Nieminen R M, Poykko S, Seitsonen A P 1999 Phys. Rev. Lett. 83 5346

  • [1]

    Ander A, Ander S, Brown I G 1995 Plasma Source Sci. Technol. 4 1

    [2]

    Zhu J Q, Wang J H, Meng S H, Han J C, Zhang L S 2004 Acta Phys. Sin. 53 1151 (in Chinese) [朱嘉琦, 王景贺, 孟松鹤, 韩杰才, 张连升 2004 物理学报 53 1151]

    [3]

    Liang F, Yan X J 1999 Acta Phys. Sin. 48 1095 (in Chinese) [梁风, 严学俭 1999 物理学报 48 1095]

    [4]

    Satyanarayana B S, Hart A, Miline W I, Robertson J 1998 Diamond Relat. Mater. 7 656

    [5]

    Gao W, Gong S L, Zhu J Q, Ma G J 2011 Acta Phys. Sin. 60 027104 (in Chinese) [高巍, 巩水利, 朱嘉琦, 马国佳 2011 物理学报 60 027104]

    [6]

    Panwar O S, Khan M A, Satyanarayana B S, Bhattacharyya R, Mehta B R, Kumar S, Ishpal I 2010 J. Vac. Sci. Technol. B 28 411

    [7]

    Panwar O S, Alim M K, Kumar M, Shivaprasad S M, Satyanarayana B S, Dixit P N, Bhattacharyya R, Khan M Y 2008 Thin Solid Films 516 2331

    [8]

    Panwar O S, Deb B, Satyanarayana B S, Khan M A, Bhattacharyya R, Pal A K 2005 Thin Solid Films 472 180

    [9]

    Polo M C, Andujar J L, Hart A, Robertson J, Milne W I 2000 Diamond Relat. Mater. 9 663

    [10]

    Panwar O S, Alim K M, Kumar S, Basu A, Mehta B R, Kumar S, Ishpal I 2010 Surf. Coat. Technol. 205 2126

    [11]

    Prawer S, Nugent K W, Lifshitz Y 1996 Diamond Relat. Mater. 5 433

    [12]

    Zhang X W, Ke N, Cheung W Y 2003 Diamond Relat. Mater. 12 1

    [13]

    Wixom M K 1990 J. Am. Ceram. Soc. 73 1973

    [14]

    Cheng Y H, Tay B K, Lau S P 2001 Diamond Relat. Mater. 10 2137

    [15]

    Colthup N B, Daly L H, Wiberly S E 1990 Introduction to Infrared and Raman Spectroscopy (3rd Ed.) (New York: Academic Press)

    [16]

    Chowdhury A K M S, Cameron D C, Hashmi M S J 1998 Thin Solid Films 332 62

    [17]

    Kaufman J H, Metin S, Saperstein D D 1989 Phys. Rev. B 39 13053

    [18]

    Merel P, Tabbal M, Chaker M, Moisa S, Margot 1998 J. Appl. Surf. Sci. 136 105

    [19]

    Ripalda J M, Roman E, Galan L 2003 J. Chem. Phys. 118 3748

    [20]

    Yu G H, Zeng L R, Zhu F W, Chai C L, Lai W Y 2001 J. Appl. Phys. 90 4039

    [21]

    Zhu J Q, Han J C, Han X, Schiaberginaki H, Wang J Z 2008 J. Appl. Phys. 104 013512

    [22]

    Das D, Chen K H, Chattopadhyay S, Chattopadhyay S Chen L C 2002 J. Appl. Phys. 91 4944

    [23]

    Papakonstantinou P, Lemoine P 2001 J. Phys. Condens. Matter 13 2971

    [24]

    Ronning C, Feldermann H, Merk R, Hofsäss H 1998 Phys. Rev. B 58 2207

    [25]

    Hellgren N, Guo J, Sathe C, Agui A, Nordgren J, Luo Y, \AAgren H, Sundgren J E 2001 Appl. Phys. Lett. 79 4348

    [26]

    Hofsäss H, Eldermann H F, Merk R, Sebastian M, Ronning C 1998 J. Appl. Phys. A 66 153

    [27]

    Majumdar A, Schäfer J, Mishra P, Ghose D, Meichsner J, Hippler R 2007 Surf. Coat. Technol. 201 6437

    [28]

    McCann R, Roy S S, Papakonstantinou P, Bain M F, Gamble H S, McLaughlin J A 2005 Thin Solid Films 482 34

    [29]

    Bhattacharyya S, Hong J, Turban G 1998 J. Appl. Phys. 83 3922

    [30]

    Kaukonen M, Nieminen R M, Poykko S, Seitsonen A P 1999 Phys. Rev. Lett. 83 5346

  • [1] 朱孟龙, 杨俊, 董玉兰, 周源, 邵岩, 侯海良, 陈智慧, 何军. Cu(111)衬底上单层铁电GeS薄膜的原子和电子结构研究. 物理学报, 2024, 73(1): 010701. doi: 10.7498/aps.73.20231246
    [2] 许思维, 王训四, 沈祥. 结合高分辨率X射线光电子能谱和拉曼散射研究GexGa8S92–x玻璃结构. 物理学报, 2023, 72(1): 017101. doi: 10.7498/aps.72.20221653
    [3] 杨蒙生, 易泰民, 郑凤成, 唐永建, 张林, 杜凯, 李宁, 赵利平, 柯博, 邢丕峰. 沉积态铀薄膜表面氧化的X射线光电子能谱. 物理学报, 2018, 67(2): 027301. doi: 10.7498/aps.67.20172055
    [4] 许思维, 王丽, 沈祥. GexSb20Se80-x玻璃的拉曼光谱和X射线光电子能谱. 物理学报, 2015, 64(22): 223302. doi: 10.7498/aps.64.223302
    [5] 张锐, 张代贤, 张帆, 何振, 吴建军. 脉冲等离子体推力器羽流沉积薄膜的结构与光学性质研究. 物理学报, 2013, 62(2): 025207. doi: 10.7498/aps.62.025207
    [6] 杨发展, 沈丽如, 王世庆, 唐德礼, 金凡亚, 刘海峰. 等离子体增强化学气相沉积法制备含氢类金刚石膜的紫外Raman光谱和X射线光电子能谱研究. 物理学报, 2013, 62(1): 017802. doi: 10.7498/aps.62.017802
    [7] 刘天元, 孙成林, 里佐威, 周密. Raman光谱方法研究三氯甲烷与苯分子间的 C/H相互作用. 物理学报, 2012, 61(10): 107801. doi: 10.7498/aps.61.107801
    [8] 张旺, 徐法强, 王国栋, 张文华, 李宗木, 王立武, 陈铁锌. Fe/ZnO (0001)体系界面相互作用中薄膜厚度效应的光电子能谱研究. 物理学报, 2011, 60(1): 017104. doi: 10.7498/aps.60.017104
    [9] 张山丽, 曾繁明, 王欣桐, 李春, 王成伟, 张莹, 林海, 秦杰明, 刘景和. Cr4+:Ca2 GeO4激光晶体生长及结构表征. 物理学报, 2010, 59(10): 7214-7218. doi: 10.7498/aps.59.7214
    [10] 韩录会, 张崇宏, 张丽卿, 杨义涛, 宋银, 孙友梅. 低速高电荷态重离子辐照的GaN晶体表面X射线光电子能谱研究. 物理学报, 2010, 59(7): 4584-4590. doi: 10.7498/aps.59.4584
    [11] 李永华, 刘常升, 孟繁玲, 王煜明, 郑伟涛. NiTi合金薄膜厚度对相变温度影响的X射线光电子能谱分析. 物理学报, 2009, 58(4): 2742-2745. doi: 10.7498/aps.58.2742
    [12] 何丽静, 林晓娉, 王铁宝, 刘春阳. 单晶Si表面离子束溅射沉积Co纳米薄膜的研究. 物理学报, 2007, 56(12): 7158-7164. doi: 10.7498/aps.56.7158
    [13] 王晓雄, 李宏年. Sm富勒烯的芯态光电子能谱. 物理学报, 2006, 55(8): 4259-4264. doi: 10.7498/aps.55.4259
    [14] 钟红梅, 陈效双, 王金斌, 夏长生, 王少伟, 李志锋, 徐文兰, 陆 卫. 基于离子注入技术的ZnMnO半导体材料的制备及光谱表征. 物理学报, 2006, 55(4): 2073-2077. doi: 10.7498/aps.55.2073
    [15] 欧谷平, 宋 珍, 桂文明, 张福甲. 原子力显微镜与x射线光电子能谱对LiBq4/ITO和LiBq4/CuPc/ITO的表面分析. 物理学报, 2005, 54(12): 5717-5722. doi: 10.7498/aps.54.5717
    [16] 冯玉清, 赵 昆, 朱 涛, 詹文山. 磁性隧道结热稳定性的x射线光电子能谱研究. 物理学报, 2005, 54(11): 5372-5376. doi: 10.7498/aps.54.5372
    [17] 徐波, 余庆选, 吴气虹, 廖源, 王冠中, 方容川. 应力和掺杂对Mg:GaN薄膜光致发光光谱影响的研究. 物理学报, 2004, 53(1): 204-209. doi: 10.7498/aps.53.204
    [18] 张红瑞, 梁二军, 丁佩, 杜祖亮, 郭新勇. 硼碳氮纳米管的热解法制备及生长机理研究. 物理学报, 2002, 51(12): 2901-2905. doi: 10.7498/aps.51.2901
    [19] 苑进社, 陈光德, 齐鸣, 李爱珍, 徐卓. 分子束外延GaN薄膜的X射线光电子能谱和俄歇电子能谱研究. 物理学报, 2001, 50(12): 2429-2433. doi: 10.7498/aps.50.2429
    [20] 李刘合, 张海泉, 崔旭明, 张彦华, 夏立芳, 马欣新, 孙跃. X射线光电子能谱辅助Raman光谱分析类金刚石碳膜的结构细节. 物理学报, 2001, 50(8): 1549-1554. doi: 10.7498/aps.50.1549
计量
  • 文章访问数:  6476
  • PDF下载量:  490
  • 被引次数: 0
出版历程
  • 收稿日期:  2011-09-16
  • 修回日期:  2012-05-28
  • 刊出日期:  2012-05-05

/

返回文章
返回