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| 悬臂梁弯曲法研究氮化钛薄膜临界开裂行为与损毁机理 |
| 刘长清, 金柱京, 李美栓, 呼和吉夫, 吴维? |
| 中国科学院金属腐蚀与防护研究所腐蚀科学开放研究实验室,沈阳110015 |
| CRITICAL CRACKING AND DAMAGE MODE OF TITANIUM NITRIDE FILMS |
| LIU CHANG-QING, JIN ZHU-JING, LI MEI-SHUAN, HUHE JI-FU, WU WEI-TAO |
| 中国科学院金属腐蚀与防护研究所腐蚀科学开放研究实验室,沈阳110015 |
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摘要： 本文提出并设计了悬臂梁弯曲实验法用来研究物理汽相沉积薄膜分别受拉和受压状态下变形和开裂行为,声发射技术被用来监测薄膜的开裂或剥落从而确立薄膜临界开裂的判据。对钛基氮化钛薄膜体系研究结果表明,薄膜处于受拉和受压状态下临界开裂载荷值分别为800gf和1285gf。还结合薄膜的强度极限或界面结合强度研究了薄膜在两种服役情形下的损毁机理。
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Abstract： The critical cracking and damage mode of titanium nitride films on pure titanium substrate at ambient temperature were investigated by the Cantilever Bending test. Acoustic Emission technique was employed for identifying the onset of the films fracture which occured with the load increasing when the inner stress of the films σf reached its ultimate strength σc or the shear stress at the interface τf reached the adhesion strength τc. In terms of the above criterions, the initial cracking of the film on the top occured at the inner of films when the load was increased to a critical value, i.e. Lct = 800gf; Whilst the cracking of the film on the bottom started along the interface at the critical load Lcc= 1285 gf. In addition, the feature of the cracking and spalling of the film has been discussed.
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收稿日期: 1991-06-25
出版日期: 2005-07-03
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| 引用本文: |
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刘长清,金柱京,李美栓 等 . 悬臂梁弯曲法研究氮化钛薄膜临界开裂行为与损毁机理. 物理学报, 1992, 41(7): 1142.
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| Cite this article: |
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LIU CHANG-QING,JIN ZHU-JING,LI MEI-SHUAN et al. CRITICAL CRACKING AND DAMAGE MODE OF TITANIUM NITRIDE FILMS. Acta Phys. Sin., 1992, 41(7): 1137-1142.
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| URL: |
| http://wulixb.iphy.ac.cn/CN/Y1992/V41/I7/1137 |
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1992, Vol. 41 
