|
|
|
| MgB2超导膜的厚度与其Jc(5K,0T)的关系 |
| 陈艺灵1, 张辰1, 何法2, 王达1, 王越1, 冯庆荣1 |
1. 北京大学物理学院, 北京大学人工微结构与介观国家重点实验室, 北京大学应用超导研究中心, 北京 100871;
2. 北京大学重离子物理研究所, 北京 100871 |
| Thickness dependence of critical current density in MgB2 films fabricated by hybrid physical-chemical vapor deposition |
| Chen Yi-Ling1, Zhang Chen1, He Fa2, Wang Da1, Wang Yue1, Feng Qing-Rong1 |
1. Application Superconductivity Research Center, State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China;
2. School of Physics and State Key Laboratory of Nuclear Physics and Technology, Peking University, Beijing 100871, China |
|
|
摘要： 通过混合物理化学气相沉积法 (hybrid physical-chemical vapor deposition, HPCVD), 在(000l) SiC 衬底上制得一系列从10 nm到8 μm的MgB2超导膜样品, 并对它们的形貌、超导转变温度Tc 和临界电流密度Jc与膜厚度的关系进行了研究. 观察到Tc随膜厚度增加上升到最大值后, 尽管膜继续增厚, 但Tc值保持近乎平稳, 而Jc则先随膜厚度增加上升到最高值后, 继而则随膜的厚度的增加而下降. MgB2膜的Tc(0)和Tc(onset)值与膜厚的关系基本一致, Tc(0)在膜厚为230 nm处达到最大值Tc(0)=41.4 K, 而Jc(5K,0T)在膜厚为100 nm时达到最大值, Jc (5 K, 0 T)=2.3×108A·cm-2, 这也说明了我们能用HPCVD方法制备出高质量干净MgB2超导膜. 本文研究的超导膜厚度变化跨度非常大, 从10 nm级的超薄膜到100 nm级的薄膜, 再到几微米的厚膜, 如此Tc和Jc对膜厚度变化的依赖就有了较完整、成体系的研究. 并且本文的工作对MgB2超导薄膜制备的厚度选取具有实际应用意义.
关键词：
MgB2超导膜
混合物理化学气相沉积法
厚度
临界电流密度
|
|
Abstract： MgB2 superconducting films with a thickness of 10 nm to 8 μ have been prepared on SiC substrates by hybrid physical-chemical vapor deposition (HPCVD). The study on Tc and Jc shows that as the film grows thicker, Tc increases and then keeps stable, which Jc increases at first, and then drops dramatically. We get the maximum Tc at 41.4 K and Jc at 2.3× 108 A·cm-2. This also shows that we can use the method of HPCVD to prepare high-quality of clean MgB2 film. And its thickness can be from 10nm ultrathin films and 100 nm thin films up to 8 μm thick film. It is the first time so far as we know that Tc and Jc are studied in this range of thickness. This will lead to a complete and systematical understanding of the superconducting MgB2 films. And it is also important and practical to choose the thickness when preparing MgB2 films.
Keywords：
MgB2 superconducting film
hybrid physical-chemical vapor deposition
thickness
critical current density
|
|
收稿日期: 2013-04-08
|
| PACS: |
74.25.-q
|
(Properties of superconductors)
|
| |
74.70.-b
|
(Superconducting materials other than cuprates)
|
|
| 基金: 国家重点基础研究发展计划973(批准号:2006CD601004,2011CB605904,2011CBA00104);国家自然科学基金(批准号51177160,11074008)和国家基础科学人才培养基金(批准号:J0630311)资助的课题. |
References
| [1] | Zeng X H, Pogrebnyakov A J, Kotcharov A, Jones J E, Xi X X, Lysczek E M, Redwing J M, Xu S Y, Li Q, Lettieri J, Schlom D G, Tian W, Pan X Q, Liu Z K 2002 Nat. Mater. 1 1
|
| [2] | Zhuang C G, Meng S, Zhang C Y, Feng Q R, Gan Z Z, Yang H, Jing Y, Wen H H, Xi X X 2009 Journal of Applied Physics 104 013924
|
| [3] | Li F, Guo T, Zhang K C, Chen C P, Feng Q R 2007 Physica C 452 6
|
| [4] | Li F, Guo T, Zhang K C, Chen L P, Chen C P, Feng R 2006 Supercond. Sci. Technol.19 1196
|
| [5] | Zhuang C G, Yao D, Li F, Zhang K C, Feng Q R, Gan Z Z 2007 Supercond. Sci. Technol. 20 287
|
| [6] | He F, Xie D T, Feng Q R, Liu K X 2012 Supercond. Sci. Technol. 25 065003
|
| [7] | Li F, Guo T, Zhang K C, Chen C P, Feng Q R 2006 Front.Phys.China. 4 446
|
| [8] | Zhang K C, Ding L L, Zhuang C G, Chen L P, Chen C P, Feng Q R 2006 Phys. Stat Sol. A 203 2463
|
| [9] | Zhang C, Wang D, Zhang Y, Wang Y, Feng Q R, Gan Z Z 2013 IEEE Transactions on Applied Superconductivity 237500204
|
| [10] | Mina Hanna, Shufang Wang, Joan M Redwing, Xi X X, Kamel Salama 2009 Supercond. Sci. Technol. 22 015024
|
| [11] | Wang S F, Liu Z, Zhou Y L, Zhu Y B, Chen Z H, Lu H B,Cheng B L, Yang G Z 2004 Supercond. Sci. Technol. 17 1126
|
| [12] | Yakinci Z D, Aydogdu Y 2011 J. Supercond. Nov Magn. 24 523
|
| [13] | Chandra Shekhar, Srivastava O N 2011 Physica C 471 104
|
| [14] | Wang Y Z, Zhuang C G, Sun X A, Huang X, Fu Q, Liao Z M, Yu D P, Feng Q R 2009 Supercond. Sci. Technol. 22 125015
|
| [15] | Zeng X H, Pogrebnyakov A V, Zhu M H, Jones J E, Xi X X, Xu S Y, Wertz E, Li Q 2003 Appl. Phys. Lett 82 2097
|
| [16] | Jung S G, Seong W K, Kang W N 2012 Journal of Applied Physics 111 053906
|
| [17] | Wang Y B, Meng S, Dai Q, Yan Zhang, Feng O R 2012 Advanced Materials Research 567 153
|
| [18] | Xi X X, Pogrebnyakov A V, Zeng X H, Redwing J M, Xu S Y, Li Q, Liu Z K, Lettieri J, Vaithyanathan V, Schlom D G, Christen H M,Y Zhai H, Goyal A 2004 Supercond. Sci. Technol. 17 S196
|
| [19] | Bean C P 1962 Phys Rev. 8 250
|
| [20] | Wang Y B, Xue C, Feng Q R 2012 Acta. Phys. Sin. 61 197401 (in Chinese) [王银博, 薛驰, 冯庆荣 2012 物理学报 61 197401]
|
| [21] | Feng Q R, Chen C P, Xu J, Kong L W, Chen X, Wang Y Z, Zhang Y, Gao Z X 2004 Physica C-superconductivity and its applications 411 41
|
| [22] | Yan S C, Yan G, Liu C F, Lu Y F, Zhou L J 2007 Alloys Comp. 437 298
|
| [23] | Zhuang C G, Tan T, Wang Y, Bai S S, Ma X B, Yang H, Zhang G H, He Y S, Wen H H, Xi X X, Feng Q R, Gan Z Z 2008 Supercond. Sci. Technol. 22 025002
|
| [24] | Pan J Y, Zhang C, HeE F, Feng Q R 2013 Acta Phys. Sin. 62 127401 (in Chinese) [潘杰云, 张辰, 何法, 冯庆荣 2013 物理学报 62 127401]
|
| [25] | Sun X, Huang X, Wang Y Z, Feng Q R 2011 Acta. Phys. Sin. 60 087401 (in Chinese) [孙玄, 黄煦, 王亚洲, 冯庆荣 2011 物理学报 60 087401]
|
| [26] | Wang Z D, Chen Z J, Duan Z Z, Wang W Q 2011 Chinese Phys. Lett. 18 677
|
| [27] | Cao G Z, Wang Y 2012 Nanostructures and Nanomaterials-Synthesis Properties, and Applications 2nd Edition (Higher Education Press) p318 (in Chinese) [曹国忠, 王颖著, 董星龙译 2012 纳米结构和纳米材料合成、性质及应用 (北京: 高等教育出版社) 第318页]
|
| [28] | Blatter G, Feigel’man M V, Geshkenbein V B, Larkin A I, Vinokur V M 1994 Rev. Mod. Phys. 66 1125
|
|
[1]
|
谢朝, 邹炼, 侯氢, 郑霞. 质子束治疗中非均匀组织的等效水厚度修正研究[J]. 物理学报, 2013, 62(6): 068701.
|
|
[2]
|
张韵, 谢自力, 王健, 陶涛, 张荣, 刘斌, 陈鹏, 韩平, 施毅, 郑有炓. GaN薄膜中的马赛克结构随厚度发生的变化[J]. 物理学报, 2013, 62(5): 056101.
|
|
[3]
|
王杨, 李昂, 谢品华, 陈浩, 徐晋, 吴丰成, 刘建国, 刘文清. 多轴差分吸收光谱技术反演气溶胶消光系数垂直廓线[J]. 物理学报, 2013, 62(18): 180705.
|
|
[4]
|
田晶, 杨鑫, 刘尚军, 练晓娟, 陈金伟, 王瑞林. 直流磁控溅射厚度对Cu(Inx,Ga1-x)Se2背接触Mo薄膜性能的影响[J]. 物理学报, 2013, 62(11): 116801.
|
|
[5]
|
李霞, 张镭. 基于后向轨迹追踪模式分析SACOL气溶胶 来源及其光学特性[J]. 物理学报, 2012, 61(2): 023402.
|
|
[6]
|
王银博, 薛驰, 冯庆荣 . 钛离子辐照对MgB2超导薄膜的载流能力和磁通钉扎能力的影响 [J]. 物理学报, 2012, 61(19): 197401.
|
|
[7]
|
杨晓阔, 蔡理, 康强, 柏鹏, 赵晓辉, 冯朝文, 张立森. 磁性量子元胞自动机逻辑电路的转换特性研究[J]. 物理学报, 2011, 60(9): 098503.
|
|
[8]
|
王英龙, 张鹏程, 刘虹让, 刘保亭, 傅广生. 晶粒尺寸及衬底应力对铁电薄膜特性的影响[J]. 物理学报, 2011, 60(7): 077702.
|
|
[9]
|
岂云开, 顾建军, 刘力虎, 张海峰, 徐芹, 孙会元. Al掺杂ZnO薄膜的厚度对其结构及磁学性能的影响[J]. 物理学报, 2011, 60(6): 067502.
|
|
[10]
|
於黄忠, 温源鑫. 不同厚度的活性层及阴极的改变对聚合物太阳电池性能的影响[J]. 物理学报, 2011, 60(3): 038401.
|
|
[11]
|
杨智, 邹继军, 常本康. 透射式指数掺杂GaAs光电阴极最佳厚度研究[J]. 物理学报, 2010, 59(6): 4290-4295.
|
|
[12]
|
司福祺, 谢品华, 窦科, 詹铠, 刘宇, 徐晋, 刘文清. 被动多轴差分吸收光谱大气气溶胶光学厚度监测方法研究[J]. 物理学报, 2010, 59(4): 2867-2872.
|
|
[13]
|
毕志伟, 冯倩, 郝跃, 岳远征, 张忠芬, 毛维, 杨丽媛, 胡贵州. Al2O3介质层厚度对AlGaN/GaN金属氧化物半导体-高电子迁移率晶体管性能的影响[J]. 物理学报, 2009, 58(10): 7211-7215.
|
|
[14]
|
孙贤明, 哈恒旭. 基于反射太阳光反演气溶胶光学厚度和有效半径[J]. 物理学报, 2008, 57(9): 5565-5570.
|
|
[15]
|
杨玉娟, 王锦程, 张玉祥, 朱耀产, 杨根仓. 采用多相场法研究三维层片共晶生长的厚度效应[J]. 物理学报, 2008, 57(8): 5290-5295.
|
|
|
|
2013, Vol. 62 
