Search

Article

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

Method of accurately measuring silicon sphere density difference based on hydrostatic suspension principls

Wang Jin-Tao Liu Zi-Yong

Citation:

Method of accurately measuring silicon sphere density difference based on hydrostatic suspension principls

Wang Jin-Tao, Liu Zi-Yong
PDF
Get Citation

(PLEASE TRANSLATE TO ENGLISH

BY GOOGLE TRANSLATE IF NEEDED.)

  • The micro density difference between silicon single crystal spheres is not only important for the research on the redefinition of Avogadro constant based on quantum standard, but also a key solution for quality control for the production of silicon single crystal with ultra-high purity in semi-conductor industry. To overcome the complexity of non-contact laser interferometer method and improve the accuracy of hydro-weight method, a method based on the hydrostatic suspension principle is realized. The silicon single spheres to be measured are immersed into mixture liquid including 1,2,3-tribromopropane and 1,2-dibromoethane, and floated freely by adjusting the temperature and pressure of the liquid. The micro density difference between two silicon single crystal spheres is calculated based on a mathematical model by using liquid temperature, pressure, and central floatation height difference in the floatation condition. The stable constant temperature liquid with maximal error ± 100 μ K is realized by two-cycle water bath and PID control system. The floatation height of silicon single crystal sphere is determined by binary image and iterative algorithm. The stable suspension is achieved by the PID pressure control system, and the temperature fluctuation due to Joule-Thomson effect is reduced. By means of linearity between changes of temperature and pressure in hydrostatic suspension model, the compressibility of mixture liquid is measured. The experimental results show that the influence from liquid surface tension is avoided by using the hydrostatic suspension method, and accurate measurement of density difference between silicon single crystal spheres can be achieved with an uncertainty of 2.1× 10-7 (expand factor k=1).
    • Funds: Project supported by the National Natural Science Foundation of China (Grant No. 51105347), the Special Fund for Quality and Inspection Research in the Public Interest, China (Grant No. AHY0711) and National Science Supported Planning Projects, China (Grant No. 2011BAI02B03).
    [1]

    Fujii K, Waseda A, Kuramoto, N, Mizushima S, Becker P, Bellin H, Nicolaus A, Kuetgens U, Valkiers S, Tayler P, de Biever P, Mare G, Massa E, Matyi R, Kessler J, Emerst G B, Hamke M 2005 IEEE Trans. Instrum. Meas. 54 854

    [2]

    Yun J F, Zhu H N 2007 Physics. 36 543 (in Chinese) [岳峻峰, 朱鹤年 2007 物理 36 543]

    [3]

    Luo Z Y, Yang L F, Gu Y Z, Guo L G, Ding J A, Chen Z H 2008 Acta Meirolocica Sinica 29 211 (in Chinese) [罗志勇, 杨丽峰, 顾英姿, 郭立功, 丁京安, 陈朝晖 2008 计量学报 29 211]

    [4]

    Fujii K, Tanaka M, Nezu Y, 1999 Metrologia 36 455

    [5]

    Becker Peter 2001 Report On Progress In Physics. 64 1945

    [6]

    Wu C Y, Gu J H, Feng Y Y, Xue Y, Lu J X 2012 Acta Phys. Sin. 61 157803 (in Chinese) [吴晨阳, 谷锦华, 冯亚阳, 薛源, 卢景霄 2012 物理学报 61 157803]

    [7]

    Elwenspoek M, Jansen M H 2006 Silicon Micromachining (Beijing: Chemical Industry Press) p10 (in Chinese) [M.埃尔温斯波克, H.扬森 2006 硅微机械加工技术 (北京: 化学工业出版社) 第10页]

    [8]

    Xu J, Li F L, Yang D R 2007 Acta Phys. Sin. 56 4113 (in Chinese) [徐进, 李福龙, 杨德仁 2007 物理学报 56 4113]

    [9]

    Martin J, Bettin H, Kuetgens U, Schiel D, Becker P 1999 IEEE Trans. Instrum. Meas. 48 216

    [10]

    Bettin H, Toth H 2006 Measurement Science and Technology 17 2567

    [11]

    Luo Z Y 2004 Acta Me'irolocica Sinica 25 138 (in Chinese) [罗志勇 2004 计量学报 25 138]

    [12]

    Kuramoto N, Fujii K 2005 IEEE Trans. Instrum. Meas. 54 868

    [13]

    Kozdon A F, Spieweck F 1992 IEEE Trans. Instrum. Meas. 41 420

    [14]

    Nicolaus R A, Fujii K 2006 Meas. Sci. Technol. 17 2527

    [15]

    Luo Z Y, Yang L F, Gu Y Z, 2007 Chinese Science Bulletin. 52 2881

    [16]

    Kang Y H, Zhu J G, Luo Z Y, Ye S H 2008 Acta Optica Sinica 11 2148 (in Chinese) [康岩辉, 邾继贵, 罗志勇, 叶声华 2008 光学学报 11 2148]

    [17]

    Borsch G, Bohme H 1989 Optik 82 161

    [18]

    Nicolaus R A, Bonsch G 2005 Metrologia 42 24

    [19]

    Luo Z Y, Yang L F, Chen Y C 2005 Acta Phys. Sin. 54 3051 (in Chinese) [罗志勇, 杨丽峰, 陈允昌 2005 物理学报 54 3051]

    [20]

    Luo Z Y, Gu Y Z, Zhang J T, Yang L F, Guo L G 2010 IEEE Trans. Instrum. Meas. 59 2991

    [21]

    Kuramoto N, Fujii K 2003 IEEE Trans. Instrum. Meas. 52 631

    [22]

    Nicolaus R A, Geckeler R D 2007 IEEE Trans. Instrum. Meas. 56 517

    [23]

    Waseda A, Fujii K 2001 Meas. Sci. Technol. 12 2039

    [24]

    Bettin, H, Glaser M, Spieweck F, Toth H, Saceoni A, Peut A, Fajii K, Tanake M, Nezu Y 1997 IEEE Trans. Instrum. Meas. 46 556

    [25]

    Fujii K, Waseda A, Tanaka M 2001 IEEE Trans. Instrum. Meas. 50 616

    [26]

    Fujii K, Tanaka M 2006 14th International Conference on the Properties of Water and Steam Kyoto, Japan, August 29-September 3, 2006 p132

    [27]

    Fujii K, Waseda A, Kuramoto N, Mizushima S, Valkiers S, Taylor P, Bievre D 2003 IEEE Trans. Instrum. Meas. 52 646

    [28]

    Mykolajewycz R, Kalnajs J, Smakula A 1964 J. Appl. Phys. 35 1773

    [29]

    Seyfried P, Balhorn R, Kochsiek M, Kozdon A F, Rademacher H J, Wagenbreth H, Peuto A M, Sacconi A 1987 IEEE Trans. Instrum. Meas. 36 161

  • [1]

    Fujii K, Waseda A, Kuramoto, N, Mizushima S, Becker P, Bellin H, Nicolaus A, Kuetgens U, Valkiers S, Tayler P, de Biever P, Mare G, Massa E, Matyi R, Kessler J, Emerst G B, Hamke M 2005 IEEE Trans. Instrum. Meas. 54 854

    [2]

    Yun J F, Zhu H N 2007 Physics. 36 543 (in Chinese) [岳峻峰, 朱鹤年 2007 物理 36 543]

    [3]

    Luo Z Y, Yang L F, Gu Y Z, Guo L G, Ding J A, Chen Z H 2008 Acta Meirolocica Sinica 29 211 (in Chinese) [罗志勇, 杨丽峰, 顾英姿, 郭立功, 丁京安, 陈朝晖 2008 计量学报 29 211]

    [4]

    Fujii K, Tanaka M, Nezu Y, 1999 Metrologia 36 455

    [5]

    Becker Peter 2001 Report On Progress In Physics. 64 1945

    [6]

    Wu C Y, Gu J H, Feng Y Y, Xue Y, Lu J X 2012 Acta Phys. Sin. 61 157803 (in Chinese) [吴晨阳, 谷锦华, 冯亚阳, 薛源, 卢景霄 2012 物理学报 61 157803]

    [7]

    Elwenspoek M, Jansen M H 2006 Silicon Micromachining (Beijing: Chemical Industry Press) p10 (in Chinese) [M.埃尔温斯波克, H.扬森 2006 硅微机械加工技术 (北京: 化学工业出版社) 第10页]

    [8]

    Xu J, Li F L, Yang D R 2007 Acta Phys. Sin. 56 4113 (in Chinese) [徐进, 李福龙, 杨德仁 2007 物理学报 56 4113]

    [9]

    Martin J, Bettin H, Kuetgens U, Schiel D, Becker P 1999 IEEE Trans. Instrum. Meas. 48 216

    [10]

    Bettin H, Toth H 2006 Measurement Science and Technology 17 2567

    [11]

    Luo Z Y 2004 Acta Me'irolocica Sinica 25 138 (in Chinese) [罗志勇 2004 计量学报 25 138]

    [12]

    Kuramoto N, Fujii K 2005 IEEE Trans. Instrum. Meas. 54 868

    [13]

    Kozdon A F, Spieweck F 1992 IEEE Trans. Instrum. Meas. 41 420

    [14]

    Nicolaus R A, Fujii K 2006 Meas. Sci. Technol. 17 2527

    [15]

    Luo Z Y, Yang L F, Gu Y Z, 2007 Chinese Science Bulletin. 52 2881

    [16]

    Kang Y H, Zhu J G, Luo Z Y, Ye S H 2008 Acta Optica Sinica 11 2148 (in Chinese) [康岩辉, 邾继贵, 罗志勇, 叶声华 2008 光学学报 11 2148]

    [17]

    Borsch G, Bohme H 1989 Optik 82 161

    [18]

    Nicolaus R A, Bonsch G 2005 Metrologia 42 24

    [19]

    Luo Z Y, Yang L F, Chen Y C 2005 Acta Phys. Sin. 54 3051 (in Chinese) [罗志勇, 杨丽峰, 陈允昌 2005 物理学报 54 3051]

    [20]

    Luo Z Y, Gu Y Z, Zhang J T, Yang L F, Guo L G 2010 IEEE Trans. Instrum. Meas. 59 2991

    [21]

    Kuramoto N, Fujii K 2003 IEEE Trans. Instrum. Meas. 52 631

    [22]

    Nicolaus R A, Geckeler R D 2007 IEEE Trans. Instrum. Meas. 56 517

    [23]

    Waseda A, Fujii K 2001 Meas. Sci. Technol. 12 2039

    [24]

    Bettin, H, Glaser M, Spieweck F, Toth H, Saceoni A, Peut A, Fajii K, Tanake M, Nezu Y 1997 IEEE Trans. Instrum. Meas. 46 556

    [25]

    Fujii K, Waseda A, Tanaka M 2001 IEEE Trans. Instrum. Meas. 50 616

    [26]

    Fujii K, Tanaka M 2006 14th International Conference on the Properties of Water and Steam Kyoto, Japan, August 29-September 3, 2006 p132

    [27]

    Fujii K, Waseda A, Kuramoto N, Mizushima S, Valkiers S, Taylor P, Bievre D 2003 IEEE Trans. Instrum. Meas. 52 646

    [28]

    Mykolajewycz R, Kalnajs J, Smakula A 1964 J. Appl. Phys. 35 1773

    [29]

    Seyfried P, Balhorn R, Kochsiek M, Kozdon A F, Rademacher H J, Wagenbreth H, Peuto A M, Sacconi A 1987 IEEE Trans. Instrum. Meas. 36 161

  • [1] Guo Zhong-Kai, Li Yong-Gang, Yu Bo-Cheng, Zhou Shi-Chao, Meng Qing-Yu, Lu Xin-Xin, Huang Yi-Fan, Liu Gui-Peng, Lu Jun. Research progress of lock-in amplifiers. Acta Physica Sinica, 2023, 72(22): 224206. doi: 10.7498/aps.72.20230579
    [2] Li Yan, Ren Zhi-Hong. Quantum Fisher information of multi-qubit WV entangled state under Lipkin-Meshkov-Glick model. Acta Physica Sinica, 2023, 72(22): 220302. doi: 10.7498/aps.72.20231179
    [3] Xu Yi-Dan, Jiang Wen-Yu, Tong Ji-Hong, Han Lu-Lu, Zuo Zi-Tan, Xu Li-Ming, Gong Xiao-Chun, Wu Jian. Precise measurement of attosecond dynamics of NO molecular shape resonance. Acta Physica Sinica, 2022, 71(23): 233301. doi: 10.7498/aps.71.20221735
    [4] Liu Xin, Zhou Xiao-Peng, Wen Wei-Qiang, Lu Qi-Feng, Yan Cheng-Long, Xu Guo-Qin, Xiao Jun, Huang Zhong-Kui, Wang Han-Bing, Chen Dong-Yang, Shao Lin, Yuan Yang, Wang Shu-Xing, Ma Wan-Lu, Ma Xin-Wen. Spectral calibration for electron beam ion trap and precision measurement of M1 transition wavelength in Ar13+. Acta Physica Sinica, 2022, 71(3): 033201. doi: 10.7498/aps.71.20211663
    [5] Chen Jiao-Jiao, Sun Yu, Wen Jin-Lu, Hu Shui-Ming. A bright and stable beam of slow metastable helium atoms. Acta Physica Sinica, 2021, 70(13): 133201. doi: 10.7498/aps.70.20201833
    [6] Spectral Calibration for Electron Beam Ion Trap and Precision Measurement of M1 Transition Wavelength in Ar13+. Acta Physica Sinica, 2021, (): . doi: 10.7498/aps.70.20211663
    [7] Zhao Tian-Ze, Yang Su-Hui, Li Kun, Gao Yan-Ze, Wang Xin, Zhang Jin-Ying, Li Zhuo, Zhao Yi-Ming, Liu Yu-Zhe. Accurate measurement of optical fiber time delay based on frequency domain reflectometry. Acta Physica Sinica, 2021, 70(8): 084204. doi: 10.7498/aps.70.20201075
    [8] Wang Jin, Zhan Ming-Sheng. Test of weak equivalence principle of microscopic particles based on atom interferometers. Acta Physica Sinica, 2018, 67(16): 160402. doi: 10.7498/aps.67.20180621
    [9] Tan Wen-Hai, Wang Jian-Bo, Shao Cheng-Gang, Tu Liang-Cheng, Yang Shan-Qing, Luo Peng-Shun, Luo Jun. Recent progress in testing Newtonian inverse square law at short range. Acta Physica Sinica, 2018, 67(16): 160401. doi: 10.7498/aps.67.20180636
    [10] Guan Hua, Huang Yao, Li Cheng-Bin, Gao Ke-Lin. 40Ca+ optical frequency standards with high accuracy. Acta Physica Sinica, 2018, 67(16): 164202. doi: 10.7498/aps.67.20180876
    [11] Liu Jian-Ping, Wu Jun-Fei, Li Qing, Xue Chao, Mao De-Kai, Yang Shan-Qing, Shao Cheng-Gang, Tu Liang-Cheng, Hu Zhong-Kun, Luo Jun. Progress on the precision measurement of the Newtonian gravitational constant G. Acta Physica Sinica, 2018, 67(16): 160603. doi: 10.7498/aps.67.20181381
    [12] Wang Lei, Guo Hao, Chen Yu-Lei, Wu Da-Jin, Zhao Rui, Liu Wen-Yao, Li Chun-Ming, Xia Mei-Jing, Zhao Bin-Bin, Zhu Qiang, Tang Jun, Liu Jun. A method of measuring micro-displacement based on spin magnetic resonance effect of diamond color center. Acta Physica Sinica, 2018, 67(4): 047601. doi: 10.7498/aps.67.20171914
    [13] Peng Shijie, Liu Ying, Ma Wenchao, Shi Fazhan, Du Jiangfeng. High-resolution magnetometry based on nitrogen-vacancy centers in diamond. Acta Physica Sinica, 2018, 67(16): 167601. doi: 10.7498/aps.67.20181084
    [14] Mu Xiu-Li, Li Chuan-Liang, Deng Lun-Hua, Wang Hai-Ling. Spectra of I2+ for possible measurement of α and μ constant. Acta Physica Sinica, 2017, 66(23): 233301. doi: 10.7498/aps.66.233301
    [15] Sun Heng-Xin, Liu Kui, Zhang Jun-Xiang, Gao Jiang-Rui. Quantum precision measurement based on squeezed light. Acta Physica Sinica, 2015, 64(23): 234210. doi: 10.7498/aps.64.234210
    [16] Feng Gao-Ping, Sun Yu, Zheng Xin, Hu Shui-Ming. Design and measurement of a magnetic field for precision spectroscopy of helium. Acta Physica Sinica, 2014, 63(12): 123201. doi: 10.7498/aps.63.123201
    [17] Zou Shuai, Tang Zhong-Hua, Ji Liang-Liang, Su Xiao-Dong, Xin Yu. Application of floating microwave resonator probe to the measurement of electron density in electronegative capacitively coupled plasma. Acta Physica Sinica, 2012, 61(7): 075204. doi: 10.7498/aps.61.075204
    [18] Yang Zhi-Hu, Zhang Xiao-An, Zhao Yong-Tao, Yin Wei-Wei, Li Ning-Xi. Precision measurement of excited spectra of oxygen ions. Acta Physica Sinica, 2006, 55(9): 4520-4527. doi: 10.7498/aps.55.4520
    [19] CHEN MIN-RUI, SHEN YI-HUI, LIU SHI-YI. A STUDY ON PROPERTIES OF Au-DOPED SILICON. Acta Physica Sinica, 1992, 41(3): 491-499. doi: 10.7498/aps.41.491
    [20] FAN HAI-FU. AN IMPROVED PROCEDURE OF SOLVING DIFFERENCE STRUCTURES. Acta Physica Sinica, 1981, 30(11): 1539-1542. doi: 10.7498/aps.30.1539
Metrics
  • Abstract views:  5523
  • PDF Downloads:  587
  • Cited By: 0
Publishing process
  • Received Date:  15 August 2012
  • Accepted Date:  05 September 2012
  • Published Online:  05 February 2013

/

返回文章
返回