A STUDY OF DAMAGE IN SILICON CREATED BY P<sub>2</sub><sup>+</sup> IMPLANTATION
Acta Physica Sinica
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Acta Phys. Sin.  1988, Vol. 37 Issue (9): 1425-1431    
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A STUDY OF DAMAGE IN SILICON CREATED BY P2+ IMPLANTATION
FANG ZI-WEI, LIN CHENG-LU, ZOU SHI-CHANG
中国科学院上海冶金研究所离子束开放实验室
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