PROPERTIES OF a-SiC<sub>x</sub>N<sub>y</sub>∶H FILMS PRODUCED BY REACTIVE-SPUTTERING
Acta Physica Sinica
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Acta Phys. Sin.  1999, Vol. 48 Issue (1): 134-139    
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search  |   
PROPERTIES OF a-SiCxNy∶H FILMS PRODUCED BY REACTIVE-SPUTTERING
WU XIAN-CHENG, WANG YIN-YUE
兰州大学物理系,兰州 730001
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