Abstract In this article Au was deposited on PVF(Polyviny formal) film which was kept at 253 K to grow Au submonolayer film. It is found that there are special areas whose morphology differs from other's experiment in which metal was deposited on single crystal. In these areas especially big clusters were found and they were surrounded by empty bands. Our deduction that this is caused by variation of local coefficient is proved by a modified DDA(Deposition-Diffusion-Aggregation) model which includes edge diffusion. We also argue that the relationship between cluster diffusion coefficient DS, and particles numbers S which the cluster contains should be exponential for Au cluster on PVF film instead of power-dependent in original DDA model.