SELF-CONSISTENT DESCRIPTION OF A DC HOLLOW CATHODE DISCHARGE AND ANALYSIS OF CATHODE SPUTTERING
Acta Physica Sinica
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Acta Phys. Sin.  2001, Vol. 50 Issue (8): 1528-1533    
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Current Issue| Next Issue| Archive| Adv Search  |   
SELF-CONSISTENT DESCRIPTION OF A DC HOLLOW CATHODE DISCHARGE AND ANALYSIS OF CATHODE SPUTTERING
WANG XIN-BING1, QIU JUN-LIN1, LAI JIAN-JUN2, YU JIAN-HUA3, HUANG JIAN-JUN4
(1)华中科技大学激光技术国家重点实验室,武汉430074; (2)华中科技大学激光技术国家重点实验室,武汉430074;深圳大学光电子系与华中科技大学激光技术国家重点实验室联合培养的博士研究生; (3)深圳大学科技研究院光电子系,深圳518060; (4)深圳大学理学院,深圳518060
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