Monte Carlo simulation of electron transmission through masks in projection electron lithography
Acta Physica Sinica
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Acta Phys. Sin.  2006, Vol. 55 Issue (11): 5803-5809    
ATOMIC AND MOLECULAR PHYSICS Current Issue| Next Issue| Archive| Adv Search  |   
Monte Carlo simulation of electron transmission through masks in projection electron lithography
Zhang Zeng-Ming1, Xiao Pei2, Sun Xia2, Ding Ze-Jun2
(1)合肥微尺度物质科学国家实验室,中国科学技术大学天文与应用物理系,合肥 230026; (2)合肥微尺度物质科学国家实验室,中国科学技术大学物理系,合肥 230026
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