Characteristics of electron energy distribution function of capacitively coupled plasma excited by 60MHz RF source
Acta Physica Sinica
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Acta Phys. Sin.  2008, Vol. 57 Issue (10): 6465-6470    
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Current Issue| Next Issue| Archive| Adv Search  |   
Characteristics of electron energy distribution function of capacitively coupled plasma excited by 60MHz RF source
Sun Kai, Xin Yu, Huang Xiao-Jiang, Yuan Qiang-Hua, Ning Zhao-Yuan
苏州大学物理科学与技术学院,江苏省薄膜材料重点实验室,苏州 215006
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