Thickness and optical constant determination of hydrogenated amorphous silicon thin film from transmittance spectra of ellipsometer
Acta Physica Sinica
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Acta Phys. Sin.  2008, Vol. 57 Issue (3): 1542-1547    
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Thickness and optical constant determination of hydrogenated amorphous silicon thin film from transmittance spectra of ellipsometer
Liao Nai-Man1, Li Wei1, Jiang Ya-Dong1, Wu Zhi-Ming1, Kuang Yue-Jun2, Qi Kang-Cheng2, Li Shi-Bin2
(1)电子科技大学,电子薄膜与集成器件国家重点实验室,成都 610054; (2)电子科技大学,光电信息学院,成都 610054
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