Analysis on the ionization of high power pulsed unbalanced magnetron sputtering powered by direct current
Acta Physica Sinica
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Acta Phys. Sin.  2011, Vol. 60 Issue (1): 015204    
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Current Issue| Next Issue| Archive| Adv Search  |   
Analysis on the ionization of high power pulsed unbalanced magnetron sputtering powered by direct current
Mu Zong-Xin, Mu Xiao-Dong, Wang Chun, Jia Li, Dong Chuang
Key Laboratory of M7aterials Modification by Laser, Ion and Electron Beams (Dalian University of Technology), Ministry of Education, School of Physics and Optoelectronic technology, Dalian University of Technology, Dalian 116024,China
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