Influence of sputtering pressure on microstructure and mechanical properties of TiN/SiN<sub><i>x</i></sub> multilayer coatings
Acta Physica Sinica
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Acta Phys. Sin.  2011, Vol. 60 Issue (1): 016801    
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search  |   
Influence of sputtering pressure on microstructure and mechanical properties of TiN/SiNx multilayer coatings
Wang Li-Li1, An Tao2, Wen Mao3, Zheng Wei-Tao3
(1)College of Science, Changchun University, Changchun 130022, China; (2)College of Science, Changchun University, Changchun 130022, China;Department of Materials Science, Jilin University, Changchun 130012, China; (3)Department of Materials Science, Jilin University, Changchun 130012, China
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