Molecular dynamics simulations of low-energy Clatoms etching Si(100) surface
Acta Physica Sinica
Citation Search Quick Search
Acta Phys. Sin.  2011, Vol. 60 Issue (4): 045209    
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Current Issue| Next Issue| Archive| Adv Search  |   
Molecular dynamics simulations of low-energy Clatoms etching Si(100) surface
He Ping-Ni, Ning Jian-Ping, Qin You-Min, Zhao Cheng-Li, Gou Fu-Jun
Institute of Plasma Surface Interactions, Guizhou University, Guiyang 550025, China
Copyright © Acta Physica Sinica
Address: Institute of Physics, Chinese Academy of Sciences, P. O. Box 603,Beijing 100190 China
Tel: 010-82649294,82649829,82649863   E-mail: aps8@iphy.ac.cn