Research of subwavelength grating based on multilayer films structure
Acta Physica Sinica
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Acta Phys. Sin  2012, Vol. 61 Issue (10): 104203     doi:10.7498/aps.61.104203
ELECTROMAGENTISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS Current Issue| Archive| Adv Search  |   
Research of subwavelength grating based on multilayer films structure
Liang Gao-Feng1 2, Zhao Qing1, Chen Xin1 2, Wang Chang-Tao2, Zhao Ze-Yu2, Luo Xian-Gang2
1. School of Physical Electronics, University of Electronic Science and Technology of China, Chengdu 610054, China;
2. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optical and Electronics,Chinese Academy of Science, Chengdu 610209, China
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