Investigation of copper precipitation in denuded zone in Czochralski silicon
Acta Physica Sinica
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Acta Phys. Sin  2013, Vol. 62 Issue (7): 076103     doi:10.7498/aps.62.076103
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Current Issue| Archive| Adv Search  |   
Investigation of copper precipitation in denuded zone in Czochralski silicon
Zhang Guang-Chao1, Xu Jin1 2
1. College of Materials, Xiamen University, Xiamen 361005, China;
2. State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027, China
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