Effects of nano-scale particles in chemical mechanical polishing process
Acta Physica Sinica
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Acta Phys. Sin.  2005, Vol. 54 Issue (5): 2123-2127    
CLASSICAL AREA OF PHENOMENOLOGY Current Issue| Next Issue| Archive| Adv Search  |   
Effects of nano-scale particles in chemical mechanical polishing process
Zhang Chao-Hui1, Luo Jian-Bin2, Wen Shi-Zhu2
(1)北京交通大学机电学院,100044; (2)清华大学摩擦学国家重点实验室,100084
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