The microstructure of hydrogenated microcrystalline silicon thin films studied by small-angle x-ray scattering
Acta Physica Sinica
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Acta Phys. Sin.  2005, Vol. 54 Issue (5): 2172-2175    
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The microstructure of hydrogenated microcrystalline silicon thin films studied by small-angle x-ray scattering
Li Guo-Hua1, Ding Kun1, Dong Bao-Zhong2, Liu Feng-Zhen3, Zhu Mei-Fang3, Gu Jin-Hua3, Zhou Yu-Qin3, Liu Jin-Long3, Zhou Bing-Qing4
(1)中国科学院半导体研究所,北京 100083; (2)中国科学院高能物理研究所北京同步辐射实验室,北京 100039; (3)中国科学院研究生院物理系,北京 100039; (4)中国科学院研究生院物理系,北京 100039;内蒙古师范大学物理系,呼和浩特 010022
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