Simulation of step response of silane low-temperature pasma(1)
Acta Physica Sinica
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Acta Phys. Sin.  2005, Vol. 54 Issue (7): 3251-3256    
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Current Issue| Next Issue| Archive| Adv Search  |   
Simulation of step response of silane low-temperature pasma(1)
Yang Jing, Li Jing-Zhen, Sun Xiu-Quan, Gong Xiang-Dong
深圳大学工程技术学院,深圳 518060
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