Fabrication of microcrystalline silicon thin film and the study of its microstructure and stability
Acta Physica Sinica
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Acta Phys. Sin.  2005, Vol. 54 Issue (8): 3910-3914    
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Fabrication of microcrystalline silicon thin film and the study of its microstructure and stability
Zhang Xiao-Dan, Zhao Ying, Gao Yan-Tao, Zhu Feng, Wei Chang-Chun, Sun Jian, Geng Xin-Hua, Xiong Shao-Zhen
南开大学光电子薄膜器件与技术研究所,天津 300071;南开大学光电子薄膜器件与技术天津市重点实验室,天津 300071;南开大学光电信息技术科学教育部重点实验室,天津 300071
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