The PIC/MCC simulation of the ionization processes in electron cyclotron resonance discharge (Ⅱ)——Numerical simulation and discussion of results
Acta Physica Sinica
Citation Search Quick Search
Acta Phys. Sin.  2006, Vol. 55 Issue (11): 5935-5941    
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Current Issue| Next Issue| Archive| Adv Search  |   
The PIC/MCC simulation of the ionization processes in electron cyclotron resonance discharge (Ⅱ)——Numerical simulation and discussion of results
Jin Xiao-Lin, Yang Zhong-Hai
电子科技大学物理电子学院,成都 610054
Copyright © Acta Physica Sinica
Address: Institute of Physics, Chinese Academy of Sciences, P. O. Box 603,Beijing 100190 China
Tel: 010-82649294,82649829,82649863   E-mail: aps8@iphy.ac.cn