Bi-material mircocantilever array room-temperature IR imaging
Acta Physica Sinica
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Acta Phys. Sin.  2006, Vol. 55 Issue (7): 3208-3214    
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Bi-material mircocantilever array room-temperature IR imaging
Miao Zheng-Yu1, Zhang Qing-Chuan1, Wu Xiao-Ping1, Guo Zhe-Ying1, Dong Feng-Liang1, Xiong Zhi-Ming1, Chen Da-Peng2, Li Chao-Bo2
(1)中国科学技术大学,中国科学院材料力学行为和设计重点实验室,合肥 230027; (2)中国科学院微电子研究所,北京 100029
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