Study of ZnO film growth by reactive magnetron sputtering using plasma emission spectra
Acta Physica Sinica
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Acta Phys. Sin.  2006, Vol. 55 Issue (8): 4232-4237    
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search  |   
Study of ZnO film growth by reactive magnetron sputtering using plasma emission spectra
Li Yong, Sun Cheng-Wei, Liu Zhi-Wen, Zhang Qing-Yu
大连理工大学三束材料改性国家重点实验室,大连 116023
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