A novel microstructure for in-situ measurement of residual stress in micromechanical thin films
Acta Physica Sinica
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Acta Phys. Sin.  2007, Vol. 56 Issue (10): 5691-5697    
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A novel microstructure for in-situ measurement of residual stress in micromechanical thin films
Yu Yi-Ting, Yuan Wei-Zheng, Qiao Da-Yong, Liang Qing
西北工业大学微/纳米系统实验室,西安 710072
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