Effect of dry etching on light emission of InAsP/InP SMQWs
Acta Physica Sinica
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Acta Phys. Sin.  2007, Vol. 56 Issue (2): 1027-1031    
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search  |   
Effect of dry etching on light emission of InAsP/InP SMQWs
Zhang Jun1, Jiang Shan1, Wu Hui-Zhen2, Liu Cheng2, Lao Yan-Feng2, Huang Zhan-Chao2, Xie Zheng-Sheng2, Cao Meng3
(1)武汉邮电科学研究院,武汉 430074; (2)中国科学院上海微系统与信息技术研究所信息功能材料国家重点实验室,上海 200050; (3)中国科学院上海微系统与信息技术研究所信息功能材料国家重点实验室,上海 200050;中国科学院研究生院,北京 100039
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