Inductively coupled plasma etching of two-dimensional InP/InGaAsP-based photonic crystal
Acta Physica Sinica
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Acta Phys. Sin.  2007, Vol. 56 Issue (2): 977-981    
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Current Issue| Next Issue| Archive| Adv Search  |   
Inductively coupled plasma etching of two-dimensional InP/InGaAsP-based photonic crystal
Fan Zhong-Chao1, Ma Xiao-Tao2, Zheng Wan-Hua2, Ren Gang2, Chen Liang-Hui2
(1)半导体集成技术工程研究中心,中国科学院半导体研究所,北京 100083; (2)纳米光电子实验室,中国科学院半导体研究所,北京 100083
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