THE "BUILDING BLOCK" TYPE PATTERN GENERATOR AND ITS PATTERN GENERATION METHOD
Acta Physica Sinica
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Acta Phys. Sin.  1976, Vol. 25 Issue (1): 88-90    
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THE "BUILDING BLOCK" TYPE PATTERN GENERATOR AND ITS PATTERN GENERATION METHOD
AUTOMATIC MASK MAKING GROUP
中国科学院半导体研究所
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