RF magnetron sputtering of GaP thin film and computer simulation of its depositing process
Acta Physica Sinica
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Acta Phys. Sin.  2007, Vol. 56 Issue (5): 2937-2944    
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search  |   
RF magnetron sputtering of GaP thin film and computer simulation of its depositing process
Li Yang-Ping, Liu Zheng-Tang, Zhao Hai-Long, Liu Wen-Ting, Yan Feng
西北工业大学材料学院,西安 710072
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