Study of Si-doped Sb<sub>2</sub>Te<sub>3</sub> films for phase change memory
Acta Physica Sinica
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Acta Phys. Sin.  2007, Vol. 56 Issue (7): 4224-4228    
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search  |   
Study of Si-doped Sb2Te3 films for phase change memory
Chen Bomy1, Cai Yan-Fei2, Lin Yin-Yin2, Tang Ting-Ao2, Zhang Zu-Fa3, Zhang Yin3, Feng Jie3, Cai Bing-Chu3
(1)Silicon Storage Technology Inc.,Sunnyvale,CA94086,USA; (2)复旦大学专用集成电路和系统国家重点实验室,上海 200433; (3)上海交通大学“薄膜与微细技术”教育部重点实验室,“微米/纳米加工技术”国家级重点实验室,微纳科学技术研究院,上海 200030
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