Mesoscopic mechanical characterization of hydrogenated silicon thin film and the intrinsic relationship with the microstructure
Acta Physica Sinica
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Acta Phys. Sin.  2007, Vol. 56 Issue (8): 4834-4840    
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Mesoscopic mechanical characterization of hydrogenated silicon thin film and the intrinsic relationship with the microstructure
Wang Quan1, Ding Jian-Ning1, Fan Zhen1, He Yu-Liang2, Xue Wei3
(1)江苏大学微纳米科学技术研究中心,镇江 212013; (2)江苏大学微纳米科学技术研究中心,镇江 212013;南京大学物理系,南京 210093; (3)温州大学工业工程学院,温州 323035
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