The design, fabrication and performance of a large area 10000 line/mm metal transmission diffraction gratings for soft X-ray
Acta Physica Sinica
Citation Search Quick Search
Acta Phys. Sin.  2008, Vol. 57 Issue (10): 6386-6392    
CLASSICAL AREA OF PHENOMENOLOGY Current Issue| Next Issue| Archive| Adv Search  |   
The design, fabrication and performance of a large area 10000 line/mm metal transmission diffraction gratings for soft X-ray
Shi Pei-Xiong1, Zhou Hong-Jun2, Huo Tong-Lin2, Zhu Xiao-Li3, Ma Jie3, Xie Chang-Qing3, Zhu Wei-Zhong4, Wu Yan-Qing4, Guo Zhi4, Tai Ren-Zhong4, Xu Hong-Jie4
(1)丹麦科技大学,哥本哈根 2800; (2)中国科技大学国家同步辐射实验室,合肥 230029; (3)中国科学院微电子研究所,北京 100029; (4)中科院上海应用物理研究所,上海 201800
Copyright © Acta Physica Sinica
Address: Institute of Physics, Chinese Academy of Sciences, P. O. Box 603,Beijing 100190 China
Tel: 010-82649294,82649829,82649863   E-mail: aps8@iphy.ac.cn