Two-dimensional particle-in-cell simulation of the ion sheath dynamics in plasma source ion implantation of a hemispherical bowl-shaped target
Acta Physica Sinica
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Acta Phys. Sin.  2008, Vol. 57 Issue (10): 6450-6456    
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Current Issue| Next Issue| Archive| Adv Search  |   
Two-dimensional particle-in-cell simulation of the ion sheath dynamics in plasma source ion implantation of a hemispherical bowl-shaped target
Wang De-Zhen1, Wang Yan-Hui1, Liu Cheng-Sen2, Liu Tian-Wei3
(1)大连理工大学物理与光电工程学院,三束材料改性国家重点实验室,大连 116023; (2)辽宁师范大学物理与电子技术学院,大连 116029; (3)中国工程物理研究院表面物理与化学国家重点实验室,绵阳 621900
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