Investigation of microcrystalline silicon germanium prepared by hydrogen and helium gas mixture diluted VHFPA-RTCVD
Acta Physica Sinica
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Acta Phys. Sin.  2008, Vol. 57 Issue (11): 7338-7343    
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Investigation of microcrystalline silicon germanium prepared by hydrogen and helium gas mixture diluted VHFPA-RTCVD
Zhang Li-Ping, Zhang Jian-Jun, Zhang Xin, Shang Ze-Ren, Hu Zeng-Xin, Zhang Ya-Ping, Geng Xin-Hua, Zhao Ying
南开大学光电子薄膜器件与技术研究所,天津市光电子薄膜器件与技术重点实验室,天津 300071
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