Low-loss 193nm anti_reflection coatings
Acta Physica Sinica
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Acta Phys. Sin.  2008, Vol. 57 Issue (3): 1946-1950    
INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY Current Issue| Next Issue| Archive| Adv Search  |   
Low-loss 193nm anti_reflection coatings
Shang Shu-Zhen1, Shao Jian-Da2, Fan Zheng-Xiu2
(1)华东理工大学机械与动力工程学院承压系统安全科学教育部重点实验室,上海 200237; (2)中国科学院上海光学精密机械研究所,上海 201800
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