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Study of space voltage distribution between large-area parallel-plate electrodes for very high frequency plasma enhanced chemical vapor deposition

Ge Hong Zhang Xiao-Dan Yue Qiang Zhao Jing Zhao Ying

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Study of space voltage distribution between large-area parallel-plate electrodes for very high frequency plasma enhanced chemical vapor deposition

Ge Hong, Zhang Xiao-Dan, Yue Qiang, Zhao Jing, Zhao Ying
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  • Abstract views:  7644
  • PDF Downloads:  1374
  • Cited By: 0
Publishing process
  • Received Date:  12 September 2007
  • Accepted Date:  06 March 2008
  • Published Online:  05 April 2008

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