Influence of wet etching on the morphologies of Si patterned substrates and ZnO epilayers
Acta Physica Sinica
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Acta Phys. Sin.  2009, Vol. 58 Issue (1): 309-314    
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Influence of wet etching on the morphologies of Si patterned substrates and ZnO epilayers
Su Xi-Yu1, Zhang Tian-Chong2, Mei Zeng-Xia2, Liu Zhang-Long2, Liu Yao-Ping2, Guo Yang2, Du Xiao-Long2, Xue Qi-Kun3, Cui Xiu-Zhi4
(1)曲阜师范大学物理工程学院,曲阜 273165; (2)中国科学院物理研究所,北京 100190; (3)中国科学院物理研究所,北京 100190;清华大学物理系,北京 100084; (4)中国科学院物理研究所,北京 100190;曲阜师范大学物理工程学院,曲阜 273165