An optical emission spectroscopy study on the high rate growth of microcrystalline silicon films
Acta Physica Sinica
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Acta Phys. Sin.  2009, Vol. 58 Issue (2): 1344-1347    
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An optical emission spectroscopy study on the high rate growth of microcrystalline silicon films
Han Xiao-Yan, Geng Xin-Hua, Hou Guo-Fu, Zhang Xiao-Dan, Li Gui-Jun, Yuan Yu-Jie, Wei Chang-Chun, Sun Jian, Zhang De-Kun, Zhao Ying
南开大学光电子薄膜器件与技术研究所,光电子薄膜器件与技术天津市重点实验室,光电信息技术科学教育部重点实验室,天津 300071
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