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We investigate the evolution of surface microstructure created on single crystal silicon wafer by irradiation of cumulative Nd:YAG nanosecond laser pulses (wavelength 532 or 355 nm) in vacuum. The wavy structures are formed on silicon surface by 532 or 355 nm laser on early stage of laser pulse irradiation, and nearly concentric but slightly disordered semi-circular rings are formed under 355 nm laser pulse irradiation. With the number of laser pulses increasing, the structures gradually evolved into the concave-convex structures which are similar to the beads. And finally quasi-ordered arrays of conical spikes are formed. The growth of these microstructures depends on the capillary waves and self-organization of structures. We find that the cross-ring structures are caused by the superposition of some wavy structures created by capillary waves in the process of 355 nm laser pulses irradiation.
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Keywords:
- nanosecond laser inducing /
- silicon /
- surface microstructure /
- evolution
[1] Deng Y P, Jia T Q, Leng Y X, Lu H H, Li R X, Xu Z Z 2004 Acta Phys. Sin. 532216 (in Chinese) [邓蕴沛、贾天卿、冷雨欣、陆海鹤、李儒新、徐至展 2004 物理学报 53 2216]
[2] Li C B, Jia T Q, Sun H Y, Li X X, Xu S Z, Feng D H, Wang X F, Ge X C, Xu Z Z 2006 Acta Phys. Sin. 55 217 (in Chinese) [李成斌、贾天卿、孙海轶、李晓溪、徐世珍、冯东海、王晓峰、葛晓春、徐至展 2006 物理学报 55 217]
[3] Yu B H, Dai N L, Wang Y, Li Y H, Ji L L, Zheng Q G, Lu P X 2007 Acta Phys. Sin. 56 5821 (in Chinese)[余本海、戴能利、王 英、李玉华、季玲玲、郑启光、陆培祥 2007 物理学报 56 5821]
[4] Huang W Q, Xu L, Wang H X, Jin F, Wu K Y, Liu S R, Qin C J, Qin S J 2008 Chin. Phys. B 17 1817
[5] Yang Y, Wang C, Yang R D, Li L, Xiong F, Bao J M 2009 Chin. Phys. B 18 4906
[6] Bimbaum M, Stocker T L 1966 J. Appl. Phys. 17 461
[7] Young J F, Preston J S, van Driel H M, Sipe J E 1983 Phys. Rev. B 27 1141
[8] Faucets P M, Siegman A E 1982 Appl. Phys. Lett. 40 824
[9] Rudolph P, Kautek W 2004 Thin Solid Films 453 537
[10] Bolle M, Lazare S 1993 Appl. Surf. Sci. 69 31
[11] Dolgaev S I, Lavrishev S V, Lyalin A A, Simakin A V, Voronov V V, Shafeev G A 2001 Appl. Phys. A 73 177
[12] Her T H, Finlay R J, Wu C, Deliwala S, Mazur E 1998 Appl. Phys. Lett. 73 1673
[13] Pedraza A J, Fowlkes J D, Lowndes D H 1999 Appl. Phys. Lett. 74 2322
[14] Younkin R, Carey J E, Mazur E, Levinson J A, Friend C M 2003 J. Appl. Phys. 93 2626
[15] Crouch C H, Carey J E, Shen M, Mazur E, Genin F Y 2004 Appl. Phys. A 79 1635
[16] Huang Z H, Carey J E, Liu M G, Guo X Y, Mazur E, Campbellet J C 2006 Appl. Phys. Lett. 89 033506
[17] Halbwax M, Sarnet T, Delaporte P H, Sentis M, Etienne H, Torregrosa F, Vervisch V, Perichaud I, Martinuzzi S 2008 Thin Solid Films 516 6791
[18] Wang R, Yang J J, Liang C Y, Wang H S, Han W, Yang Y 2009 Acta Phys. Sin. 58 5429(in Chinese) [王 锐、杨建军、梁春永、王洪水、韩 伟、杨 阳 2009 物理学报 58 5429]
[19] Crawford T H R, Haugen H K 2007 Appl. Surf. Sci. 253 4970
[20] Pedraza A J, Fowlkes J D, Jesse S, Mao C, Lowndes D H 2000 Appl. Surf. Sci. 168 251
[21] Kolasinski K W 2007 Curr. Opin. Solid St. M. 11 76
[22] Bloembergen N 1979 Am. Inst. Phys. Conf. Proc. 50 1
[23] Shen M Y, Crouch C H, Carey J E, Younkin R, Mazur E, Sheehy M, Friend C M 2003 Appl. Phys. Lett. 82 1715
[24] DAnna E, Luby S, Luches A, Majkova E, Martino M 1993 Appl. Phys. A 56 429
[25] Ben-Yakar A, Byer R L, Harkin A 2003 Appl. Phys. Lett. 83 3030
[26] Hardy S C 1984 J. Cryst. Growth 69 456
[27] Bassam M A, Parvin P, Sajad B, Moghimiet A, Coster H 2008 Appl. Surf. Sci. 254 2621
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[1] Deng Y P, Jia T Q, Leng Y X, Lu H H, Li R X, Xu Z Z 2004 Acta Phys. Sin. 532216 (in Chinese) [邓蕴沛、贾天卿、冷雨欣、陆海鹤、李儒新、徐至展 2004 物理学报 53 2216]
[2] Li C B, Jia T Q, Sun H Y, Li X X, Xu S Z, Feng D H, Wang X F, Ge X C, Xu Z Z 2006 Acta Phys. Sin. 55 217 (in Chinese) [李成斌、贾天卿、孙海轶、李晓溪、徐世珍、冯东海、王晓峰、葛晓春、徐至展 2006 物理学报 55 217]
[3] Yu B H, Dai N L, Wang Y, Li Y H, Ji L L, Zheng Q G, Lu P X 2007 Acta Phys. Sin. 56 5821 (in Chinese)[余本海、戴能利、王 英、李玉华、季玲玲、郑启光、陆培祥 2007 物理学报 56 5821]
[4] Huang W Q, Xu L, Wang H X, Jin F, Wu K Y, Liu S R, Qin C J, Qin S J 2008 Chin. Phys. B 17 1817
[5] Yang Y, Wang C, Yang R D, Li L, Xiong F, Bao J M 2009 Chin. Phys. B 18 4906
[6] Bimbaum M, Stocker T L 1966 J. Appl. Phys. 17 461
[7] Young J F, Preston J S, van Driel H M, Sipe J E 1983 Phys. Rev. B 27 1141
[8] Faucets P M, Siegman A E 1982 Appl. Phys. Lett. 40 824
[9] Rudolph P, Kautek W 2004 Thin Solid Films 453 537
[10] Bolle M, Lazare S 1993 Appl. Surf. Sci. 69 31
[11] Dolgaev S I, Lavrishev S V, Lyalin A A, Simakin A V, Voronov V V, Shafeev G A 2001 Appl. Phys. A 73 177
[12] Her T H, Finlay R J, Wu C, Deliwala S, Mazur E 1998 Appl. Phys. Lett. 73 1673
[13] Pedraza A J, Fowlkes J D, Lowndes D H 1999 Appl. Phys. Lett. 74 2322
[14] Younkin R, Carey J E, Mazur E, Levinson J A, Friend C M 2003 J. Appl. Phys. 93 2626
[15] Crouch C H, Carey J E, Shen M, Mazur E, Genin F Y 2004 Appl. Phys. A 79 1635
[16] Huang Z H, Carey J E, Liu M G, Guo X Y, Mazur E, Campbellet J C 2006 Appl. Phys. Lett. 89 033506
[17] Halbwax M, Sarnet T, Delaporte P H, Sentis M, Etienne H, Torregrosa F, Vervisch V, Perichaud I, Martinuzzi S 2008 Thin Solid Films 516 6791
[18] Wang R, Yang J J, Liang C Y, Wang H S, Han W, Yang Y 2009 Acta Phys. Sin. 58 5429(in Chinese) [王 锐、杨建军、梁春永、王洪水、韩 伟、杨 阳 2009 物理学报 58 5429]
[19] Crawford T H R, Haugen H K 2007 Appl. Surf. Sci. 253 4970
[20] Pedraza A J, Fowlkes J D, Jesse S, Mao C, Lowndes D H 2000 Appl. Surf. Sci. 168 251
[21] Kolasinski K W 2007 Curr. Opin. Solid St. M. 11 76
[22] Bloembergen N 1979 Am. Inst. Phys. Conf. Proc. 50 1
[23] Shen M Y, Crouch C H, Carey J E, Younkin R, Mazur E, Sheehy M, Friend C M 2003 Appl. Phys. Lett. 82 1715
[24] DAnna E, Luby S, Luches A, Majkova E, Martino M 1993 Appl. Phys. A 56 429
[25] Ben-Yakar A, Byer R L, Harkin A 2003 Appl. Phys. Lett. 83 3030
[26] Hardy S C 1984 J. Cryst. Growth 69 456
[27] Bassam M A, Parvin P, Sajad B, Moghimiet A, Coster H 2008 Appl. Surf. Sci. 254 2621
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