Acta Physica Sinica
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Acta Phys. Sin.  2010, Vol. 59 Issue (10): 7239.     DOI: 10.7498/aps.59.7239
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search |
Design and fabrication of multilayer antireflection coating for optoelectronic devices by plasma enhanced chemical vapor deposition
Yuan He, Sun Chang-Zheng, Xu Jian-Ming, Wu Qing, Xiong Bing, Luo Yi
State Key Laboratory of Integrated Optoelectronics, Tsinghua National Laboratory for Information Science and Technology, Department of Electronic Engineering, Tsinghua University, Beijing 100084, China

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