Design, fabrication and test of X-ray freestanding transmission gratings

Ma Jie; Xie Chang-Qing; Ye Tian-Chun; Liu Ming

doi:10.7498/aps.59.2564

Abstract

The diffraction efficiency of freestanding x ray transmission gratings is discussed in relation to the wavelength and grating period using both scalar diffraction theory and rigorous coupled wave analysis, and the grating design is accordingly optimized. A gold freestanding x ray transmission grating with period of 300 nm, line/period ratio of 055, thickness of 200 nm a size of 1 mm ×1 mm and fractional grating area of 65% is fabricated. The absolute diffraction efficiency of the fabricated grating was tested at the National Synchrotron Radiation Laboratory in the wavelength region of 55— 38 nm. The test result shows that the grating has a maximum efficiency of nearly 10%. The grating also shows a stable diffraction efficiency in the wavelength region from 15 nm to 35 nm.

Keywords:

Authors and contacts

1.
中国科学院微电子研究所，纳米加工与新器件集成研究室，北京 100029

References

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[24]	］Zhou C H, Wang L, Wang Z H 2001 Acta Phys. Sin. 50 1046 (in Chinese) ［周传宏、王磊、王植恒 2001 物理学报 50 1046］
[25]	］Zhou C H, Wang L, Nie Y, Wang Z H 2002 Acta Phys. Sin. 51 68 (in Chinese) ［周传宏、王磊、聂娅、王植恒 2002 物理学报 51 68］
[26]	］Schattenburg M L, Anderson E H, Smith H I 1990 Phys. Script. 41 13
[27]	］Zhu X L, Xie C Q, Ye T C, Zhao M, Ma J, Jiang J, Niu J B, Liu M 2008 Proc. SPIE 6832 68320V
[28]	］Zhu X L, Ma J, Cao L F, Yang J M, Xie C Q, Liu M, Chen B Q, Niu J B, Zhang Q Z, Jiang J, Zhao M, Ye T C 2007 Chin. J. Semiconduct. 28 91 (in Chinese) ［朱效立、马杰、曹磊峰、杨家敏、谢长青、刘明、陈宝钦、牛洁斌、张庆钊、姜骥、赵珉、叶甜春 2007 半导体学报 28 91］
[29]	］Zhu X L, Ma J, Xie C Q, Ye T C, Liu M, Cao L F, Yang J M, Zhang W H 2008 Acta Opt. Sin. 28 1026 (in Chinese)［朱效立、马杰、谢长青、叶甜春、刘明、曹磊峰、杨家敏、张文海 2008 光学学报28 1026］
[30]	］Attwood D T 2003 Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications (Beijing: Science Press) p119(in Chinese) ［Attwood D T(中译本) 2003 软X射线与极紫外辐射的原理和应用(北京:科学出版社) 第119页］

Cited By

[1]	［1］Schattenburg M L, Aucion R J, Fleming R C, Plotnik I, Porter J, Smith H I 1994 Proc. SPIE 2280 181
[2]	［2］Leeper R J, Chandler G A, Cooper G W, Derzon M S, et al 1997 Rev. Sci. Instrum. 68 868
[3]	［3］Yen A, Anderson E H, Ghanbari R A, Schattenburg M L, Smith H I 1992 Appl. Opt. 31 4540
[4]	［4］Solak H H, David C, Gobrecht J, Golovkina V, Cerrina F, Kim S O, Nealey P F 2003 Microelectron. Eng. 67—68 56
[5]	［5］Qiu K Q, Xu X D, Liu Y, Hong Y L, Fu S J 2008 Acta Phys. Sin. 57 6329(in Chinese) ［邱克强、徐向东、刘颖、洪义麟、傅绍军 2008 物理学报 57 6329］
[6]	［6］Yang J M, Ding Y N, Sun K X, Cheng J X, Jiang S E, Zheng Z J, Zhang W H 2000 Acta Phys. Sin. 49 747 (in Chinese) ［杨家敏、丁耀南、孙可煦、成金秀、江少恩、郑志坚、张文海2000 物理学报 49 747］
[7]	［7］Chen B, Zhu P P, Liu J Y, Wang J Y, Yuan Q X, Huang W X, Ming H, Wu Z Y 2008 Acta Phys. Sin. 57 1576 (in Chinese)［陈博、朱佩平、刘宜晋、王寯越、袁清习、黄万霞、明海、吴自玉 2008 物理学报 57 1576］
[8]	［8］Predehl P, Braeuninger H W, Brinkman A C, Dewey D, Drake J J, Flanagan K A, Gunsing T, Hartner G D, Juda J Z, Juda M, Kaastra J S, Marshall H L, Swartz D A 1997 Proc. SPIE 3113 172
[9]	［9］Brinkman A C, Gunsing C J T, Kaastra J S, Braeuninger H W, Hartner G D, Predehl P, Drake J J, Juda J Z, Juda M, Dewey D, Flanagan K A, Marshall H L 1997 Proc. SPIE 3113 181
[10]	］Xu X D, Hong Y L, Huo T L, Zhou H J, Tao X M, Fu S J 2001 Opti. Tech. 27 294 (in Chinese) ［徐向东、洪义麟、霍同林、周洪军、陶晓明、傅绍军 2001 光学技术 27 294］
[11]	］Xu X D, Hong Y L, Liu Y, Fu S J, Wang Z S 2005 Microfabr. Technol.01 38 (in Chinese) ［徐向东、洪义麟、刘颖、傅绍军、王占山2005 微细加工技术 01 38］
[12]	］Qiu K Q 2008 Ph.D. Dissertation (Hefei: University of Science and Technology of China) (in Chinese) ［邱克强 2008 博士学位论文（合肥：中国科技大学）］
[13]	］McMullin D R, Judge D L, Tarrio C, Vest R E, Hanser F 2004 Appl. Opt. 43 3797
[14]	］Xu X D, Hong Y L, Fu S J 2003 Vac. Sci. Technol. 23 362 (in Chinese) ［徐向东、洪义麟、傅绍军 2003 真空科学与技术 23 362］
[15]	］Xu X D, Hong Y L, Fu S J 2004 Physics 33 341 (in Chinese) ［徐向东、洪义麟、傅绍军 2004 物理 33 340］
[16]	］Schnopper H W, van Speybroeck L P, Delvaille J P, Epstein A, Kllne E, Bachrach R Z, Dijkstra J, Lantward L 1977 Appl. Opt. 16 1088
[17]	］Markert T H, Dewey D, Davis J E, Flanagan K A, Graessle D E, Bauer J M, Nelson C S 1995 Proc. SPIE 2518 424
[18]	］Yang J M, Yi R Q, Chen Z L, Sun K X, Ding Y N, Zheng Z J, Li C G, Cui M Q, Zhu P P, Cui C W 1998 Acta Phys. Sin. 47 613 (in Chinese) ［杨家敏、易荣清、陈正林、孙可煦、丁耀南、郑志坚、李朝光、崔明启、朱佩平、崔聪悟 1998 物理学报 47 613］
[19]	］Born M, Wolf E 1980 Principle of Optics (London: Pergamon) p450
[20]	］Moharam M G, Grann E B, Prommet D A, Gaylord T K 1995 J. Opt. Soc. Am. A 12 1068
[21]	］Moharam M G, Prommet D A, Grann E B, Gaylord T K 1995 J. Opt. Soc. Am. A 12 1077
[22]	］Zhu W Z, Wu Y Q, Guo Z, Zhu X L, Ma J, Xie C Q, Shi P X, Zhou H J, Huo T L, Tai R Z, Xu H J 2008 Acta Phys. Sin. 57 6386 (in Chinese)［朱伟忠、吴衍青、郭智、朱效立、马杰、谢常青、史沛熊、周洪军、霍同林、邰仁忠、徐洪杰 2008 物理学报 57 6386］
[23]	］Kong W J, Yun M J, Sun X, Liu J H, Fan Z X, Shao J D 2008 Acta Phys. Sin. 57 4904 (in Chinese) ［孔伟金、云茂金、孙欣、刘均海、范正修、邵建达 2008 物理学报 57 4904］
[24]	］Zhou C H, Wang L, Wang Z H 2001 Acta Phys. Sin. 50 1046 (in Chinese) ［周传宏、王磊、王植恒 2001 物理学报 50 1046］
[25]	］Zhou C H, Wang L, Nie Y, Wang Z H 2002 Acta Phys. Sin. 51 68 (in Chinese) ［周传宏、王磊、聂娅、王植恒 2002 物理学报 51 68］
[26]	］Schattenburg M L, Anderson E H, Smith H I 1990 Phys. Script. 41 13
[27]	］Zhu X L, Xie C Q, Ye T C, Zhao M, Ma J, Jiang J, Niu J B, Liu M 2008 Proc. SPIE 6832 68320V
[28]	］Zhu X L, Ma J, Cao L F, Yang J M, Xie C Q, Liu M, Chen B Q, Niu J B, Zhang Q Z, Jiang J, Zhao M, Ye T C 2007 Chin. J. Semiconduct. 28 91 (in Chinese) ［朱效立、马杰、曹磊峰、杨家敏、谢长青、刘明、陈宝钦、牛洁斌、张庆钊、姜骥、赵珉、叶甜春 2007 半导体学报 28 91］
[29]	］Zhu X L, Ma J, Xie C Q, Ye T C, Liu M, Cao L F, Yang J M, Zhang W H 2008 Acta Opt. Sin. 28 1026 (in Chinese)［朱效立、马杰、谢长青、叶甜春、刘明、曹磊峰、杨家敏、张文海 2008 光学学报28 1026］
[30]	］Attwood D T 2003 Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications (Beijing: Science Press) p119(in Chinese) ［Attwood D T(中译本) 2003 软X射线与极紫外辐射的原理和应用(北京:科学出版社) 第119页］

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