Diagnostics of the atmospheric pressure plasma jets for plasma enhanced chemical vapor deposition of polycrystalline silicon thin film
Acta Physica Sinica
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Acta Phys. Sin.  2010, Vol. 59 Issue (4): 2653-2660    
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Current Issue| Next Issue| Archive| Adv Search  |   
Diagnostics of the atmospheric pressure plasma jets for plasma enhanced chemical vapor deposition of polycrystalline silicon thin film
Liu Li-Ying, Zhang Jia-Liang, Guo Qing-Chao, Wang De-Zhen
大连理工大学物理与光电工程学院,大连 116023
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