-
High quality C-N-V films with different compositions were prepared on cemented carbide substrate using pulsed bias arc ion plating. The surface morphology, composition, microstructure and properties of C-N-V films were investigated by scanning electron microscopy, transmission electron microscopy, X-ray photoelectron spectroscopy, Raman spectra, grazing incident X-ray diffraction, and nano-indentation, respectively. The results show that the deposited films were nanocomposite films with VN nanocrystalline phase imbedded within diamond-like carbon(DLC) amorphous matrix. The hardness and elastic modulus, which are closely related to the composition and structure of the film, first increase and then decrease with increasing V and N contents and have the highest values of 368 and 5697 GPa exceeding that of pure DLC film prepared under the same condition when nitrogen content is 204% and vanadium content is 218%. The variation of V and N contents has significant influence on the phase structure, relative concentration of VN crystalline phase and DLC amorphous phase, and induces the formation of nano-diamond phase, hence has great effect on the properties of the films.
-
Keywords:
- C-N-V films /
- diamond-like carbon films /
- nanocomposite film /
- arc ion plating
[1] ［1］Hainsworth S V, Uhure N J 2007 Int. Mater. Rev. 52 153
[2] ［2］Robertson J 2002 Mater. Sci. Eng. R 37 129
[3] ［3］Li H X, Xu T, Chen J M, Zhou H D, Liu H W 2005 Acta Phys. Sin. 54 1885 (in Chinese) ［李红轩、徐洮、陈建敏、周惠娣、刘惠文 2005 物理学报 54 1885］
[4] ［4］Ju J H, Xia Y B, Zhang W L, Wang L J, Shi W M, Huang Z M, Li Z F, Zheng G Z, Tang D Y 2000 Acta Phys. Sin. 49 2310 (in Chinese) ［居建华、夏义本、张伟丽、王林军、史为民、黄志明、李志锋、郑国珍、汤定元 2000 物理学报 49 2310］
[5] ［5］Tan M L, Zhu J Q, Han J C, Gao W, Liu A P, Han X 2008 Mater. Res. Bull. 43 453
[6] ［6］Zhao D C, Ren N, Ma Z J, Qiu J W, Xiao G J, Wu S H 2008 Acta Phys. Sin. 57 1935 (in Chinese) ［赵栋才、任妮、马占吉、邱家稳、肖更竭、武生虎 2008 物理学报 57 1935］
[7] ［7］Singh V, Jiang J C, Meletis E I 2005 Thin Solid Films 489 150
[8] ［8］Ma G J, Liu X L, Zhang H F, Wu H C, Peng L P, Jiang Y L2007 Acta Phys. Sin. 56 2377 (in Chinese) ［马国佳、刘喜亮、张华芳、武洪臣、彭丽平、蒋艳莉 2007 物理学报 56 2377］
[9] ［9］Zhang Z Y, Lu X C, Luo J B, Shao T M, Qing T, Zhang C H 2006 Chin. Phys. 15 2697
[10] ］Inkin V N, Kirpilenko G G, Dementjev A A, Maslakov K I 2000 Diam. Relat. Mater. 9 715
[11] ］Byon E, Kim J K, Rha J J, Kwon S C, Mu Z X, Liu C, Li G Q 2007 Surf. Coat. Technol. 201 6670
[12] ］Chen C C, Hong F C N 2005 Appl. Surf. Sci. 242 261
[13] ］Veprek S, Reiprich S 1995 Thin Solid Films 268 64
[14] ］Musil J 2000 Surf. Coat. Technol. 125 322
[15] ］Pal S K, Jiang J C, Meletis E I 2007 Surf. Coat. Technol. 201 7917
[16] ］Xu P, Li J J, Wang Q, Wang Z L, Gu C Z, Cui Z 2007 J. Appl. Phys. 101 014312
[17] ］Glaser A, Surnev S, Netzer F P, Fateh N, Fontalvo G A, Mitterer C 2007 Surf. Sci. 601 1153
[18] ］Zhao Z W, Liu Y, Cao H, Ye J W, Gao S J, Tu M J 2008 J. Alloys Compd. 464 75
[19] ］Delpeux S, Beguin F, Benoit R, Erre R, Manolova N, Rashkov I 1998 Eur. Polym. J. 34 905
[20] ］Yang W B, Fan S H, Zhang G L, Ma P N, Zhang S Z, Du J 2005 Acta Phys. Sin. 54 4944 (in Chinese) ［杨武保、范松华、张谷令、马培宁、张守忠、杜健 2005 物理学报54 4944］
[21] ］Ferrari A C 2002 Diam. Relat. Mater. 11 1053
[22] ］Xu F, Zuo D W, Lu W Z, Zhang H Y, Wang M 2008 Acta Metall. Sin. 44 74 (in Chinese) ［徐锋、左敦稳、卢文壮、张海余、王珉 2008 金属学报 44 74］
[23] ］Nemanich R J 1991 Annu. Rev. Mater. Sci. 21 535
[24] ］Veprek S 1999 J. Vac. Sci. Technol. A 17 2401
[25] ］Tay B K, Cheng Y H, Ding X Z, Lau S P, Shi X, You G F, Sheeja D 2001 Diam. Relat. Mater. 10 1082
-
[1] ［1］Hainsworth S V, Uhure N J 2007 Int. Mater. Rev. 52 153
[2] ［2］Robertson J 2002 Mater. Sci. Eng. R 37 129
[3] ［3］Li H X, Xu T, Chen J M, Zhou H D, Liu H W 2005 Acta Phys. Sin. 54 1885 (in Chinese) ［李红轩、徐洮、陈建敏、周惠娣、刘惠文 2005 物理学报 54 1885］
[4] ［4］Ju J H, Xia Y B, Zhang W L, Wang L J, Shi W M, Huang Z M, Li Z F, Zheng G Z, Tang D Y 2000 Acta Phys. Sin. 49 2310 (in Chinese) ［居建华、夏义本、张伟丽、王林军、史为民、黄志明、李志锋、郑国珍、汤定元 2000 物理学报 49 2310］
[5] ［5］Tan M L, Zhu J Q, Han J C, Gao W, Liu A P, Han X 2008 Mater. Res. Bull. 43 453
[6] ［6］Zhao D C, Ren N, Ma Z J, Qiu J W, Xiao G J, Wu S H 2008 Acta Phys. Sin. 57 1935 (in Chinese) ［赵栋才、任妮、马占吉、邱家稳、肖更竭、武生虎 2008 物理学报 57 1935］
[7] ［7］Singh V, Jiang J C, Meletis E I 2005 Thin Solid Films 489 150
[8] ［8］Ma G J, Liu X L, Zhang H F, Wu H C, Peng L P, Jiang Y L2007 Acta Phys. Sin. 56 2377 (in Chinese) ［马国佳、刘喜亮、张华芳、武洪臣、彭丽平、蒋艳莉 2007 物理学报 56 2377］
[9] ［9］Zhang Z Y, Lu X C, Luo J B, Shao T M, Qing T, Zhang C H 2006 Chin. Phys. 15 2697
[10] ］Inkin V N, Kirpilenko G G, Dementjev A A, Maslakov K I 2000 Diam. Relat. Mater. 9 715
[11] ］Byon E, Kim J K, Rha J J, Kwon S C, Mu Z X, Liu C, Li G Q 2007 Surf. Coat. Technol. 201 6670
[12] ］Chen C C, Hong F C N 2005 Appl. Surf. Sci. 242 261
[13] ］Veprek S, Reiprich S 1995 Thin Solid Films 268 64
[14] ］Musil J 2000 Surf. Coat. Technol. 125 322
[15] ］Pal S K, Jiang J C, Meletis E I 2007 Surf. Coat. Technol. 201 7917
[16] ］Xu P, Li J J, Wang Q, Wang Z L, Gu C Z, Cui Z 2007 J. Appl. Phys. 101 014312
[17] ］Glaser A, Surnev S, Netzer F P, Fateh N, Fontalvo G A, Mitterer C 2007 Surf. Sci. 601 1153
[18] ］Zhao Z W, Liu Y, Cao H, Ye J W, Gao S J, Tu M J 2008 J. Alloys Compd. 464 75
[19] ］Delpeux S, Beguin F, Benoit R, Erre R, Manolova N, Rashkov I 1998 Eur. Polym. J. 34 905
[20] ］Yang W B, Fan S H, Zhang G L, Ma P N, Zhang S Z, Du J 2005 Acta Phys. Sin. 54 4944 (in Chinese) ［杨武保、范松华、张谷令、马培宁、张守忠、杜健 2005 物理学报54 4944］
[21] ］Ferrari A C 2002 Diam. Relat. Mater. 11 1053
[22] ］Xu F, Zuo D W, Lu W Z, Zhang H Y, Wang M 2008 Acta Metall. Sin. 44 74 (in Chinese) ［徐锋、左敦稳、卢文壮、张海余、王珉 2008 金属学报 44 74］
[23] ］Nemanich R J 1991 Annu. Rev. Mater. Sci. 21 535
[24] ］Veprek S 1999 J. Vac. Sci. Technol. A 17 2401
[25] ］Tay B K, Cheng Y H, Ding X Z, Lau S P, Shi X, You G F, Sheeja D 2001 Diam. Relat. Mater. 10 1082
Catalog
Metrics
- Abstract views: 7375
- PDF Downloads: 761
- Cited By: 0
下载:
