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An online degradation model is presented, in which is avoided the error in parameter degradation accelerated test, which is caused by temperature shock during parameter measurement. Through the measurement with avoiding the error parameter, the parameter degradation model can be more accurate. To demonstrate the application of the method, a kind of mature product, 3CG120, is tested in a temperature range of 150230 ℃ under online process-stress. Then the error of lifetime is obtained by utilizing the online model to be about 6.5%, much less than that of the old model (23.2%).
[1] Grillot P N, Krames M R, Zhao H, Teoh S H 2006 IEEE Trans. Dev. Mater. Rel. 6 564
[2] Huang J S 2005 IEEE Trans. Dev. Mater. Rel. 5 150
[3] [4] Meneghini M, Trevisanello L R, Zehnder U 2007 IEEE Trans. Electron Dev. 54 3245
[5] [6] [7] Zhao J Y, Liu F, Sun Q, Zhou J L 2005 Acta Electron. Sin. 33 378 (in Chinese)[赵建印、刘 芳、孙 权、周经伦 2005 电子学报 33 378]
[8] [9] Huang J S 2006 IEEE Trans. Dev. Mater. Rel. 6 46
[10] [11] Pasco R W, Schwarz J A 1983 Solid-State Electron. 26 445
[12] Li Z G, Song Z C, Sun D P 2003 Chin. J. Semicond. 24 856 (in Chinese)[李志国、宋增超、孙大鹏 2003 半导体学报 24 856]
[13] [14] Luan S Z, Liu H X, Jia R X 2008 Acta Phys. Sin. 57 2524 (in Chinese) [栾苏珍、刘红侠、贾仁需 2008 物理学报 57 2524]
[15] [16] Guo C S, Shan N N, Feng S W, Ma W D 2010 Acta Phys. Sin. 59 2350 (in Chinese) [郭春生、单尼娜、冯士维、马卫东 2010 物理学报 59 2350]
[17] -
[1] Grillot P N, Krames M R, Zhao H, Teoh S H 2006 IEEE Trans. Dev. Mater. Rel. 6 564
[2] Huang J S 2005 IEEE Trans. Dev. Mater. Rel. 5 150
[3] [4] Meneghini M, Trevisanello L R, Zehnder U 2007 IEEE Trans. Electron Dev. 54 3245
[5] [6] [7] Zhao J Y, Liu F, Sun Q, Zhou J L 2005 Acta Electron. Sin. 33 378 (in Chinese)[赵建印、刘 芳、孙 权、周经伦 2005 电子学报 33 378]
[8] [9] Huang J S 2006 IEEE Trans. Dev. Mater. Rel. 6 46
[10] [11] Pasco R W, Schwarz J A 1983 Solid-State Electron. 26 445
[12] Li Z G, Song Z C, Sun D P 2003 Chin. J. Semicond. 24 856 (in Chinese)[李志国、宋增超、孙大鹏 2003 半导体学报 24 856]
[13] [14] Luan S Z, Liu H X, Jia R X 2008 Acta Phys. Sin. 57 2524 (in Chinese) [栾苏珍、刘红侠、贾仁需 2008 物理学报 57 2524]
[15] [16] Guo C S, Shan N N, Feng S W, Ma W D 2010 Acta Phys. Sin. 59 2350 (in Chinese) [郭春生、单尼娜、冯士维、马卫东 2010 物理学报 59 2350]
[17]
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