Surface morphology and optical properties of Ta<sub>2</sub>O<sub>5</sub> films prepared by radio frequency sputtering
Acta Physica Sinica
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Acta Phys. Sin.  2011, Vol. 60 Issue (3): 038101    
INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY Current Issue| Next Issue| Archive| Adv Search  |   
Surface morphology and optical properties of Ta2O5 films prepared by radio frequency sputtering
Di Guo-Qing
Jiangsu Key Laboratory of Thin Films, Department of Physics, Soochow University, Suzhou 215006, China
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